Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism

Precision Engineering

Volumn 28, Issue 4, 2004, Pages 469-482

  Culpepper, Martin L ^a   Anderson, Gordon ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Alignment; Compliant mechanism; Electro magnetic actuation; Flexure; Magnet coil actuator; Micro manipulation; Nano manipulation; Optics; Photonics; Six axis; Spatial

Indexed keywords

ACTUATORS; ALIGNMENT; ELECTROMAGNETISM; ERROR ANALYSIS; FIBER OPTICS; KINEMATICS; MANIPULATORS; PACKAGING; PHOTONS; STRAIN; THERMAL EXPANSION;

COMPLIANT MECHANISMS; ELECTRO-MAGNETIC ACTUATION; FLEXURES; MAGNET-COIL ACTUATORS; MICRO-MANIPULATIONS; NANO-MANIPULATIONS; PHOTONICS; SIX-AXIS; SPATIAL;

PRECISION ENGINEERING;

EID: 4544259367     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2004.02.003     Document Type: Article

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