Experimental repeatability of a thermal actuator for nanopositioning

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages

  Hubbard, Neal B ^a   Howell, Larry L ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

Accuracy; Nanopositioning; Precision; Repeatability; Thermal microactuators

Indexed keywords

ELECTRIC CURRENTS; FEEDBACK CONTROL; FRICTION; LIGHT; NANOSTRUCTURED MATERIALS; POSITION MEASUREMENT; SCANNING ELECTRON MICROSCOPY; SCHEMATIC DIAGRAMS; THERMOMECHANICAL TREATMENT;

ACCURACY; NANOPOSITIONING; PRECISION; REPEATABILITY; THERMAL MICROACTUATORS;

MICROACTUATORS;

EID: 21644455641     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-59616     Document Type: Conference Paper

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