Six-degree-of-freedom micro-manipulator based on piezoelectric translators

Nanotechnology

Volumn 10, Issue 4, 1999, Pages 447-452

  Gao, Peng ^a   Swei, Shan Min ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); HINGES; KINEMATICS; MANIPULATORS; MATHEMATICAL MODELS; MECHANISMS; PIEZOELECTRIC TRANSDUCERS; SPRINGS (COMPONENTS);

MICROMANIPULATORS; PIEZOELECTRIC TRANSLATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033350577     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/10/4/315     Document Type: Article

References (9)

1. Goldfard M and Celanovic N 1999 A flexure-based gripper for small-scale manipulation Robotica 17 181-7
2. Fukuda T and Tanaka T 1990 Microelectrostatic actuator with three degrees of freedom Proc. IEEE MEMS '90 (Napa Valley, CA, 11-14 February 1990) pp 152-8
3. Portman V and Sandler B Z 1999 High-stiffness precision actuator for small displacements Int. J. Mach. Tools Manuf. 39 823-37
4. Tanikawa T and Arai T 1999 Development of a micro-manipulation system having a two-fingered micro-hand IEEE Trans. Robot. Autom. 15 152-62
5. Taniguchi M, Ikeda M, Inagaki A and Funatsu R 1992 Ultra precision wafer positioning by six-axis micro-motion mechanism Int. J. Japan Soc. Prec. Eng. 26 35-40
6. Tomita Y, Sato F, Ito K and Koyanagawa Y 1992 Decoupling method of ultraprecision stage using parallel linkage mechanism Int. J. Japan Soc. Prec. Eng. 26 47-53
7. Shim J H, Kwon D S and Cho H S 1999 Kinematic analysis and design of a six D.O.F. 3-PRPS in-parallel manipulator Robotica 17 269-81
8. Collins C L and Long G L 1995 The singularity of an in-parallel hand controller for force-reflected teleoperation IEEE Trans. Robot. Autom. 11 661-9
9. Zhang B, Zhu Z, Zhang B L, Wei E F and Wang J X 1997 A linear piezomotor of high stiffness and nanometre resolution Ann. CIRP 46 305-8