A high-performance dipole surface drive for large travel and force

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 344-347

  Hoen, S ^a   Bai, Q ^a   Harley, J A ^a   Horsley, D A ^a   Matta, F ^a   Verhoeven, T ^a   Williams, J ^a   Williams, K R ^a  

^a AGILENT LABORATORIES   (United States)

Author keywords

Actuators; Electrodes; Electrostatics; Manufacturing; Micromotors; Mirrors; Optical microscopy; Probes; Stators; Voltage

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MANUFACTURE; MICROMOTORS; MICROSYSTEMS; MIRRORS; OPTICAL MICROSCOPY; PROBES; SILICON WAFERS; STATORS; TRANSDUCERS;

EXTERNAL FEEDBACK CONTROL; LARGE TRAVEL; NANOMETER RESOLUTIONS; POLYSILICON DEPOSITION; SURFACE DRIVES;

SOLID-STATE SENSORS;

EID: 51849145353     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1395506     Document Type: Conference Paper

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