High-bandwidth high-accuracy rotary microactuators for magnetic hard disk drive tracking servos

IEEE/ASME Transactions on Mechatronics

Volumn 3, Issue 3, 1998, Pages 156-165

  Hirano, Toshiki ^b   Fan, Long Sheng ^a,b   Lee, Wen Y ^b   Hong, John ^b   Imaino, Wayne ^b   Pattanaik, Surya ^a,c   Chan, Susanna ^b   Webb, Patrick ^b   Horowitz, Roberto ^a,d   Aggarwal, Sanjay ^d   Horsley, David A ^d,e  

^a IEEE

^b IBM ALMADEN RESEARCH CENTER   (United States)

^c IBM   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e DiCon Fiberoptics   (United States)

Author keywords

Hard disk drive; High bandwidth servo; Microactuator

Indexed keywords

CONTROL SYSTEM SYNTHESIS; ELECTRODEPOSITION; ELECTROSTATIC DEVICES; ETCHING; FREQUENCY RESPONSE; HARD DISK STORAGE; MECHATRONICS; MICROELECTROMECHANICAL DEVICES; POSITION CONTROL; ROTATING MACHINERY; SERVOMECHANISMS; THREE TERM CONTROL SYSTEMS;

ELECTROSTATIC MICROACTUATORS; MAGNETIC DISK DRIVE TRACKING SERVOS; ROTARY MICROACTUATORS;

MICROACTUATORS;

EID: 0032163706     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.712111     Document Type: Article

References (11)

1. L.-S. Fan, S. J. Woodman, R. C. Moore, L. Crawforth, T. C. Reiley, and M. A. Moser, "Batch-fabricated area-efficient milli-actuator," in Proc. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 1994, pp. 38-42.
2. W. Tang, R. Miller, A. Desai, V. Temesvary, S. Wu, W. Hsieh, Y. Tai, and D. Miu, "Silicon micromachined electromagnetic microactuators for rigid disk drives," in Proc. INTERMAG'97, 1995, p. ED-08.
3. T. Hirano, L.-S. Fan, J. Gao, and W. Lee, "MEMS milli-actuator for hard-disk drive tracking servo," IEEE J. Microelectromech. Syst., vol. 7, no. 2, pp. 149-155, June 1998.
4. D. Horsley, A. Singh, A. Pisano, and R. Horowitz, "Angular micropositioner for disk drives," in Proc. IEEE MEMS'97, Jan. 1997, pp. 454-459.
5. W. C. Tang, T. C. Nguyen, and R. T. Howe, "Laterally driven polysilicon resonant microstructures," in Proc. IEEE MEMS'89, 1989, pp. 53-59.
6. J. Gao, W. Lee, T. Hirano, and L.-S. Fan, "High aspect ratio etching in polymer for microactuator application," in Proc. Micromachining and Microfabrication Process Technology'97, 1997, pp. 110-117.
7. T. Hirano and L.-S. Fan, "Invar electrodeposition for MEMS application," in Proc. SPIE Symp. Micromachining and Microfabrication, Austin, TX, Oct. 1996, pp. 252-259.
8. S. Aggarwal, "Design and control microactuators for high density disk drives," M.S. thesis, Dep. Mech. Eng., Univ. California, Berkeley, May 1997.
9. S. Aggarwal, D. Horsley, R. Horowitz, and A. P. Pisano, "Microactuators for high density disk drives," in Proc. Amer. Control Conf., Albuquerque, NM, June 1997, pp. 3979-3984.
10. G. Balas, J. Doyle, K. Glover, A. Packard, and R. Smith, μ-Analysis and Synthesis Toolbox, MUSYN and MathWorks, Inc., Natick, MA, 1995.
11. J.-Y. Yen, K. Hallamasek, and R. Horowitz, "Track-following controller design for a compound disk drive actuator," ASME J. Dynam. Syst., Measur., Contr., vol. 112, pp. 391-402, Sept. 1990.