Elemental thin film depth profiles by ion beam analysis using simulated annealing - A new tool

Journal of Physics D: Applied Physics

Volumn 36, Issue 7, 2003, Pages

  Jeynes, C ^a   Barradas, N P ^b,e   Marriott, P K ^c   Boudreault, G ^a   Jenkin, M ^a   Wendler, E ^d   Webb, R P ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^c NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^d FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^e UNIVERSITY OF LISBON   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ANNEALING; ERROR ANALYSIS; ION BEAMS; ION IMPLANTATION; MULTILAYERS; NEURAL NETWORKS; PROBLEM SOLVING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SIMULATED ANNEALING; STATISTICAL METHODS;

ION BEAM ANALYSIS (IBA);

THIN FILMS;

EID: 0345373827     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/7/201     Document Type: Review

References (177)

1. Aarts E and Korst J 1989 Simulated annealing and Boltzmann machines: a stochastic approach to combinatorial optimization and neural computing (Chichester: Wiley)
2. Alkemade P F A, Habraken F H P M and van der Weg W F 1990 On the ambiguity in the analysis of Rutherford backscattering spectra Nucl. Instrum. Methods B 45 139-42
3. Almeida S A, Silva S R P, Sealy B J and Watts J F 1999 Bond formation in ion beam synthesised amorphous gallium nitride Thin Solid Films 343-344 632-6
4. Alves E, Barradas N P, Monteiro T, Correia R and Kreissig U 2002 Ion beam studies of MBE grown GaN films on (111) silicon substrates Nucl. Instrum. Methods B 188 73-7
5. Amsel G, Menu M, Moulin J and Salomon J 1990 The 2 MV tandem pelletron accelerator of the Louvre Museum Nucl. Instrum. Methods B 45 296-301
6. Amsel G 1996 CUTBA - cleaning up the tower of babel of acronyms in IBA Nucl. Instrum. Methods B 118 52-6
7. Amsel G, Battistig G and L'Hoir A 2003 Small angle multiple scattering of fast ions, physics, stochastic theory and numerical calculations Nucl. Instrum. Methods B 201 325-88
8. Baker M A, Greaves S J, Wendler E and Fox V 2000 A comparison of in situ polishing and ion beam sputtering as surface preparation methods for XPS analysis of PVD coatings Thin Solid Films 277-278 473-7
9. Barradas N P, Scares J C, da Suva M F, Pászti F and Szilágyi E 1994 Study of multilayer substrate roughness using RBS with improved depth resolution Nucl. Instrum. Methods B 94 266-70
10. Barradas N P, Jeynes C and Webb R P 1997 Simulated annealing analysis of Rutherford backscattering data Appl. Phys. Lett. 71 291-3
11. Barradas N P, Jeynes C and Harry M A 1998a RBS/simulated annealing analysis of iron-cobalt silicides Nucl. Instrum. Methods B 136-138 1163-7
12. Barradas N P, Jeynes C, Homewood K P, Sealy B J and Milosavljević M 1998b RBS/simulated annealing analysis of silicide formation in Fe/Si systems Nucl. Instrum. Methods B 139 235-8
13. x layers formed by ion implantation of O into cubic silicon carbide Nucl. Instrum. Methods B 136-138 1168-71
14. 0.22/(001)Si superlattices Nucl. Instrum. Methods B 139 239
15. Barradas N P, Marriott P K, Jeynes C and Webb R P 1998e The RBS datafurnace: simulated annealing Nucl. Instrum. Methods B 136-138 1157-62
16. Barradas N P, Almeida S A, Jeynes C, Knights A P, Silva S R P and Sealy B J 1999a RBS and ERDA simulated annealing study of ion beam synthesised gallium nitride Nucl. Instrum. Methods B 148 463-7
17. Barradas N P, Jeynes C, Jenkin M and Marriott P K 1999b Bayesian error analysis of Rutherford backscatlering spectra Thin Solid Films 343-344 31-4
18. Barradas N P, Jeynes C, Kusano Y, Evetts J E and Hutchings I M 1999c RBS/simulated annealing and FTIR characterisation of BCN films deposited by dual magnetron sputtering Applications of Accelerators in Research and Industry CP475 ed J L Duggan and I L Morgan (New York: AIP) pp 504-7
19. Barradas N P, Jeynes C, Webb R P, Kreissig U and Grötzschel R 1999d Unambiguous automatic evaluation of multiple ion beam analysis data with simulated annealing Nucl. Instrum. Methods B 149 233-7
20. Barradas N P, Keddie J L and Sackin R 1999e Bayesian inference analysis of ellipsometry data Phys. Rev. E 59 6138-51
21. Barradas N P, Knights A P, Jeynes C, Mironov O A, Grasby T J and Parker E H C 1999f High-depth-resolution RBS data and error analysis of SiGe systems using the simulated annealing and Markov Chain Monte Carlo algorithms Phys. Rev. B 59 5097-105
22. Barradas N P and Smith R 1999g Simulated annealing analysis of nuclear reaction analysis measurements of polystyrene systems J. Phys. D 32 2964-71
23. Barradas N P, Webb R P and Jeynes C 1999h WiNDF: a windows interface to the DataFurnace code for analysing IBA data Presented at IBA14 (Dresden, July 1999) Text available on www.ee.surrey.ac.uk/SCRIBA/ndf
24. Barradas N P, Khan R U A, Anguita J V, Silva S R P, Kreissig U, Grötzschel R and Möller W 2000a Nucl. Instrum. Methods B 161 969-74
25. Barradas N P, Parascandola S, Sealy B J, Grötzschel R and Kreissig U 2000b Simultaneous and consistent analysis of NRA, RBS and ERDA data with the IBA DataFurnace Nucl. Instrum. Methods B 161-163 308-13
26. Barradas N P and Vieira A 2000c Artificial neural network algorithm for analysis of Rutherford backscattering data Phys. Rev. E 62 5818-29
27. Barradas N P 2001a Rutherford backscattering analysis of thin films and superlattices with roughness J. Phys. D 34 2109-16
28. Barradas N P, Sequeira A D, Franco N, Myronov M, Mironov O A, Philips P J and Parker E H C 2001b RBS analysis of MBE grown SiGe/(001)Si heterostructures with thin high Ge content SiGe channels for HMOS transistors Mod. Phys. Lett. B 15 1297-304
29. Barradas N P 2002a Fitting of RBS data including roughness: application to Co/Re multilayers Nucl. Instrum. Methods B 190 247-51
30. 4He in Si using Bayesian inference Nucl. Instrum. Methods B 194 15-25
31. Barradas N P, Patrício R and Vieira A 2002c RBS without humans IBA 15 Nucl. Instrum. Methods B 190 231-6
32. Bauer P, Steinbauer E and Biersack J P 1992 The width of an RBS spectrum: influence of plural and multiple scattering Nucl. Instrum. Methods B 64 711-5
33. Bauer P, Steinbauer E and Biersack J P 1993 RBS beyond the single scattering model Nucl. Instrum. Methods B 79 443-5
34. Bayes R T 1763 Essay toward solving a problem in the doctrine of chance Phil. Trans. R. Soc. 53 370
35. 2 - development of band gap and structure during annealing CREST Masterclass Project: Presented at ESPRIT Advanced Research Initiative in Microelectronics (MEL-ARI) (Athens, October 1999)
36. Bettiol A A, Jamieson D N, Prawer S and Allen M G 1994 Ion beam induced luminescence from diamond and other crystals from a nuclear microbeam Nucl. Instrum. Methods B 85 775-9
37. Bianconi M et al 2000 The Si surface yield as a calibration standard for RBS Nucl. Instrum. Methods B 161-163 293-6
38. Bibic N, Dhar S, Milosavljević M, Removic K, Rissanen L and Lieb K P 2000 Interface mixing in Ta/Si bilayers with Ar ions Nucl. Instrum. Methods B 161-163 1011-5
39. Blaauw M, Campbell J L, Fazinić S, Jakšić M, Orlic I and Van Espen P 2002 The 2000 IAEA intercomparison of PIXE spectrum analysis software Nucl. Instrum. Methods B 189 113-22
40. Børgesen P, Behrisch R and Scherzer B M U 1982 Depth profiling by ion-beam spectrometry Appl. Phys. A 27 183-95
41. Boudreault G, Jeynes C, Wendler E, Nejim A, Webb R P and Wätjen U 2002 Accurate RBS measurement of ion implant doses in silicon Surf. Interface Anal. 33 478-86
42. Bragg W H and Kleeman R 1905 On the a particles of radium, and their loss of range in passing through various atoms and molecules Phil. Mag. 10 S318-40
43. Breese M B H, Amaku A and Wilshaw P R 1998a A comparison between the use of EBIC and IBIC microscopy for semiconductor defect analysis Nucl. Instrum. Methods B 136-138 1355-60
44. Breese M B H, King P J C and de Kerckhove D G 1998b Strain and defect imaging using a nuclear microprobe Nucl. Instrum. Methods B 136-138 23-34
45. Brice D K 1973 Theoretical analysis of the energy spectra of backscattered ions Thin Solid Films 19 121-35
46. Butler J W 1990 Criteria for validity of Rutherford scatter analysis Nucl. Instrum. Methods B 45 160-5
47. 5 dielectric thin films Solid State Electron. 43 1095-9
48. Carey J D, Forrest R D, Khan R U A and Silva R R P 2000 Influence of sp(2) clusters on the field emission properties of amorphous carbon thin films Appl. Phys. Lett. 77 2006-8
49. Carey J D and Silva R R P 2001 Conditioning of hydrogenated amorphous carbon thin films for field emission via current stressing Appl. Phys. Lett. 78 347-9
50. Chu W K, Mayer J W and Nicolet M-A 1978 Backscattering Spectrometry (New York: Academic)
51. Cumpson P J 1995 Angle-resolved XPS and AES: depth resolution limits and a general comparison of properties of depth-profile reconstruction methods J. Elec. Spec. Relat. Methods 73 25-52
52. Dhar S, Milosavljevic M, Bibić N and Lieb K P 2002 Atomic mixing and interface reactions in Ta/Si bilayers during noble-gas ion irradiation Phys. Rev. B 65 Art. no 024109
53. Doolittle L R 1986 A semi-automatic algorithm for RBS analyis Nucl. Instrum. Methods B 15 227-31
54. Ecker K H, Wätjen U, Berger A, Persson L, Pritzkow W, Radtke M and Riesemeier H 2002 RBS, SY-XRF, INAA and ICP-IDMS of antimony implanted in silicon - a multi-method approach to characterize and certify a reference material Nucl. Instrum. Methods B 188 120-5
55. Eckstein W and Mayer M 1999 Rutherford backscaltering from layered structures beyond the single scattering model Nucl. Instrum. Methods B 153 337-44
56. Edge R D 1983 RBS microscopic Tomography IEEE Trans. Nucl. Sci. NS-30 1685-7
57. Edge R D 1988 Element distributions at depth from an iterative analysis of RBS spectra Nucl. Instrum. Methods B 35 309-14
58. Feldman L C, Mayer J W and Picraux S T 1982 Materials Analysis by Ion Channeling (New York: Academic)
59. Fischer R, Mayer M, von der Linden W and Dose V 1997 Enhancement of the energy resolution in ion-beam experiments with the maximum-entropy method Phys. Rev. E 55 6667-3
60. Fischer R, Mayer M, von der Linden W and Dose V 1998 Energy resolution enhancement in ion beam experiments with Bayesian probability theory Nucl. Instrum. Methods B 136-138 1140-5
61. Fitz T and Möller W 2002 AIN growth kinetics during ion nitriding of aluminum J. Appl. Phys. 92 6862-7
62. Garrett A 1991 Ockham's Razor Phys. World 4 39-42
63. Geiger H and Marsden E 1909 On a diffuse reflection of the α-particles R. Soc. Proc. A 82 495-500
64. Geiger H 1910 The scattering of the α-particles by matter R. Soc. Proc. A 83 492-504
65. Geiger H and Marsden E 1913 On the laws of deflexion of α-particles through large angles Phil. Mag. 25 604-23
66. Geman S and Geman D 1984 Stochastic relaxation, Gibbs distributions and the Bayesian restoration of images IEEE Trans. Pattern Anal. Mach. Intell. 6 721-41
67. Gilks W R and Richardson S (ed) 1996 Markov Chain Monte Carlo (London: Chapman and Hall)
68. Grime G W and Dawson M D 1995 Recent developments in data acquisition and processing on the Oxford scanning proton microprobe Nucl. Instrum. Methods B 104 107-13
69. Götz G and Gärtner K (ed) 1988 High Energy Ion Beam Analysis of Solids (Berlin: Akademie-Verlag)
70. Gurbich A F 1995 On the origin of the low energy tail in charged particle spectra Nucl. Instrum. Methods A 364 496-500
71. Gurbich A F 1997 Evaluation of non-Rutherford proton elastic scattering cross-section for oxygen Nucl. Instrum. Methods B 129 311-6
72. Gurbich A F 1998 Evaluation of non-Rutherford proton elastic scattering cross-section for carbon Nucl. Instrum. Methods B 136-138 60-5
73. Gurbich A F 1998 Evaluation of non-Rutherford proton elastic scattering cross-section for silicon Nucl. Instrum. Methods B 145 578-83
74. Gurbich A F 1999 Proton elastic scattering cross-section for carbon: confrontation of theory and experiment Nucl. Instrum. Methods B 152 403-5
75. Gurbich A F, Barradas N P, Jeynes C and Wendler E 2002 Applying elastic backscattering spectrometry when the nuclear excitation function has a fine structure Nucl. Instrum. Methods B 190 237-40
76. Harbsmeier F, Bolse W and Flank A-M 2000 Solid state reaction in Si-C multilayers induced by ion bombardment Nucl. Instrum. Methods B 166-167 385-9
77. Harry M A, Curello G, Finney M S, Reeson K J and Sealy B J 1996 Structural properties of ion beam synthesised iron-cobalt silicides J. Phys. D 29 1822-30
78. Hirvonen J-P 1995 Nuclear reaction analysis: particle-gamma reactions Handbook ed Tesmer and Nastasi, chapter 7
79. Jackson S M 1998 Optical characterisation of cubic silicon carbide PhD Thesis University of Surrey
80. Jeynes C, Jafri Z H, Webb R P, Ashwin M J and Kimber A C 1997 Accurate RBS measurements of the in content of InGaAs thin films Surf. Interface Anal. 25 254-60
81. Jeynes C, Barradas N P, Blewett M J and Webb R P 1998 Improved ion beam analysis facilities at the University of Surrey Nucl. Instrum. Methods B 136-138 1229-34
82. Jeynes C, Barradas N P, Wilde J R and Greer A L 2000a Composition of TaNiC thick films using SimAnn: elastic backscattering spectrometry Nucl. Instrum. Methods B 161-163 287-92
83. Jeynes C, Barradas N P, Rafla-Yuan H, Hichwa B P and Close R 2000b Accurate depth profiling of complex optical coatings Surf. Interface Anal. 30 237-42
84. Jeynes C, Rozenburg G G, Speakman S P and Steinke J H G 2002 A microbeam RBS analysis of low temperature direct-write inkjet deposited copper Nucl. Instrum. Methods B 188 141-5
85. Johanssen S A E and Campbell J L 1988 PIXE: A Novel Technique for Elemental Analysis (Chichester: Wiley)
86. Kirkpatrick S, Gelatt C D Jr and Vecchi M P 1983 Optimization by simulated annealing Science 220 671-80
87. Konac G, Kalbitzer S, Klatt C, Niemann D and Stoll R 1998 Energy loss and straggling of H and He ions of keV energies in Si and C Nucl. Instrum. Methods B 136-138 159-65
88. Kótai E 1994 Computer methods for analysis and simulation of RBS and ERDA spectra Nucl. Instrum. Methods B 85 588-96
89. Kogan D L, Kazancev A M and Kuzmin L E 1994 BEAM EXPERT - integrated software for nuclear analysis Nucl. Instrum. Methods B 88 495-8
90. Lanford W A, Anderberg B, Enge H and Hjorvarsson B 1998 Compact broad range magnetic spectrometer for use in ion beam analysis Nucl. Instrum. Methods B 136-138 1177-82
91. Lee P M 1977 Bayesian Statistics: An Introduction 2nd edn (London: Arnold)
92. Lennard W N, Tong S Y, Massoumi G R and Wong L 1990 On the calibration of low energy ion accelerators Nucl. Instrum. Methods B 45 281-84
93. 2 Nucl. Instrum. Methods B 73 203-13
94. 4He backscattering: experiment and simulation Nucl. Instrum. Methods B 152 370-6
95. Lennard W N 2000 Private communication
96. Leong D, Harry M A, Reeson K J and Homewood K P 1997 A silicon/iron disilicide light emitting diode operating at a wavelength of 1.5 μm Nature 387 686-8
97. Liew S C, Loh K K and Tang S M 1994 Application of an iterative maximum-likelihood algorithm in PIXE depth profiling of trace elements Nucl. Instrum. Methods B 85 621-6
98. Loh K K, Sow C H, Tan K H, Tan H S, Tang S M, Orlic I and Osipowitz T 1993 Measurement of phosphorus content in silica layers Nucl. Instrum. Methods B 75 364-6
99. Malmqvist K G (ed) 1999 Proc. 8th Int. Conf. on Particle Induced X-ray Emission and its Applications (Lund, 14-18 June 1998) Nucl. Instrum. Methods B 150
100. Mallégol J, Gorse J-P, Jeynes C, Dupont O and Keddie J 2002 Origins and effects of a surfactant excess at the surface of waterborne acrylic pressure sensitive adhesives Langmiur 18 4478-87
101. Marin N, Serruys Y and Calmon P 1996 Extraction of lateral non-uniformity statistics from Rutherford backscattering spectra Nucl. Instrum. Methods B 108 179-87
102. Marriott P K, Jenkin M, Jeynes C, Barradas N P, Webb R P and Sealy B J 1999 Rapid accurate automated analysis of complex ion beam analysis data Applications of Accelerators in Research and Industry vol CP475, ed J L Duggan and I L Morgan (New York: AIP) pp 592-5
103. Marriott P K, Jenkin M and Jeynes C 2002 The Bayesian analysis of Rutherford backscatter spectra Proc. Int. Conf. on Computational Mathematics and Modeling East-West J. Math. p 15
104. Metropolis N, Rosenbluth A W, Rosenbluth M N, Teller A H and Teller E 1953 Equation of state calculations by fast computing machines J. Chem. Phys. 21 1087-92
105. Mayer J W and Ziegler J F (ed) 1973 Proc. Int. Conf. on Ion Beam Surface Layer Analysis, Thin Solid Films 19
106. Mayer J W and Rimini E (ed) 1977 Ion Beam Handbook for Materials Analysis (New York: Academic) Known as the 'Catania' Handbook, it includes a section on PIXE
107. Mayer M 1997 SIMNRA user's guide Technical Report IPP 9/113, Max-Planck-Institut für Plasmaphysik. Garching, Germany
108. Milosavljević M, Bibic N, Perusko D, Jeynes C and Bangert U 2000 The effects of implanted arsenic on titanium suicide formation Special Defects in Semiconducting Materials ed R P Agarwala Solid State Phenomena 71 142-172 (Scitech Publications, Switzerland. 1999)
109. Milosavljević M, Shao G, Bibić N, McKinty C N, Jeynes C and Homewood K P 2001 Amorphous-iron disilicide: a promising semiconductor Appl. Phys. Lett. 79 1438-40
110. 2 by ion beam mixing Nucl. Instrum. Methods B 188 166-9
111. Möller W et al (ed) 2000 Proc. 14th Int. Conf. on Ion Beam Analysis (Dresden, September 1999) Nucl. Instrum. Methods B 161-163
112. Nagel R and Balogh A G 1999 Atomic transport in metal/ceramic interfaces under heavy ion irradiation Nucl. Instrum. Methods B 156 135-42
113. Nagel R, Hahn H and Balogh A G 1999 Diffusion processes in metal/ceramic interfaces under heavy ion irradiation Nucl. Instrum. Methods B 148 930-5
114. -1 Nucl. Instrum. Methods B 118 11-18
115. Niwa H, Nakao S and Saitoh K 1998 Application of HI-RBS to compositional analysis of thin films Nucl. Instrum. Methods B 136-138 297-300
116. Padayachee J, Prozesky V M, von der Linden W, Nkwinika M S and Dose V 1999 Bayesian PIXE background subtraction NIM B 150 129-35
117. 4He reaction to study polymer diffusion in polymer melts Nucl. Instrum. Methods B 42 130-4
118. Press W H, Teukolsky S A, Vetterling W T and Flannery B P 1992 Numerical Recipes in Fortran 2nd edn (Cambridge: Cambridge University Press) p 438
119. Pritzkow W, Vogl J, Berger A, Ecker K, Grötzschel R, Klingbeil P, Persson L, Riebe G and Wätjen U 2001 Contribution of ICP-IDMS to the certification of antimony implanted in a silicon wafer - comparison with RBS and INAA results Fresenius J. Anal. Chem. 371 867-73
120. Prozesky V M, Padayachee J, Fischer R, von der Linden W, Dose V and Ryan C G 1997 The use of maximum entropy and Bayesian techniques in nuclear microprobe applications Nucl. Instrum. Methods B 130 113-7
121. Prozesky V M, Padayachee v, Fischer R, von der Linden W, Dose V and Weller R A 1999 Bayesian techniques and the principle of maximum entropy in ion beam analysis applications Nucl. Instrum. Methods B 136-138 1146-51
122. Prozesky V M, Przybylowicz W J and Pineda C A (ed) 1999 Proc. 6th Int. Conf. on Nuclear Microprobe Technology and its Applications (Cape Town, 11-16 October 1998) Nucl. Instrum. Methods B 158
123. Pyt'ev Yu P 1983 Reduction problems in experimental investigations Math. USSR-Sbornik 120 (Trans. 1984 Math. USSR Sbornik 48 237-72 (in Russia)) 237-72
124. Rauhala E 1995 Energy loss IBA Handbook ed Tesmer and Nastasi q.v. chapter 2
125. Respaldiza M A and Gómez-Camacho J (ed) 1997 Applications of Ion Beam Analysis to Arts and Archaeometry Universidad de Sevilla
126. Riley L S, Hall S, Harris J, Fernandez J, Gallas B, Evans A G R, Clarke J F, Humphrey J, Murray R T and Jeynes C 1999 SiGe nMOSFETs with gate oxide grown by low temperature plasma oxidation Microelectron. Engng. 48 227-30
127. Rodil S, Morrison N A, Milne W I, Robertson J, Stolojan V and Jayawardane D N 2000 Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source Diamond Relat. Mater. 9 524-9
128. Rokita E, Maj B, Mutsaers P H A and de Voigt M J A 1997 The use of the maximum entropy method for the improvement of the spacial resolution of micro-PIXE maps Nucl. Instrum. Methods B 130 138-43
129. Ronning C, Buttner M, Vetter U, Feldermann H, Wondratschek O, Hofsass H, Brunner W, Au F C K, Li Q and Lee S T 2001 Ion beam deposition of fluorinated amorphous carbon J. Appl. Phys. 90 4237-45
130. Rozenberg G G, Bresler E, Speakman S P, Jeynes C and Steinke J H G 2002 Patterned low temperature copper-rich deposits using inkjet printing Appl. Phys. Lett. 81 5249-51
131. Ross J, Barradas N P, Hill M P, Jeynes C, Morrisey P and Watts J F 2001 Rutherford backscattering spectrometry and computer simulation for the in-depth analysis of chemically modified poly(vinylidene fluoride) J. Mater. Sci. 36 1-8
132. Rutherford E 1911 The scattering of α and β particles by matter and the structure of the atom Phil. Mag. 21 669-88
133. Ryan C G, van Achterbergh E, Yeats C J, Drieberg S L, Mark G, McInnes B M, Win T T, Cripps G and Suter G F 2002 Quantitative, high sensitivity, high resolution, nuclear microprobe imaging of fluids, melts and minerals Nucl. Instrum. Methods B 188 18-27
134. 5 reference materials BCR 261 by six laboratories Nucl. Instrum. Methods B 30 140-51
135. Serruys Y 1990 Rational smoothing applied to Rutherford backscattering spectrometry Nucl. Instrum. Methods B 44 473-8
136. Serruys Y 1991 Simulation of Rutherford backscattering spectra: retrograde method Nucl. Instrum. Methods B 61 221-5
137. Serruys Y, Tirara J and Calmon P 1993 Concentration profile reconstitution from Rutherford backscattering spectra Nucl. Instrum. Methods B 74 565-72
138. Shorin V S and Sosnin A N 1992 RBS spectra for thin films with surface roughness Nucl. Instrum. Methods B 72 452-6
139. Simon A, Pászti F, Uzonyi I, Manuaba A, KissÁ Z and Rajta I 1998 Observation of surface topography using an RBS microbeam Nucl. Instrum. Methods B 136-138 344-9
140. Slotte J, Laakso A, Ahlgren T, Rauhala E, Salonen R, Räisänen J, Simon A, Uzonyi I, Kiss Á Z and Somorjai E 2000 Influence of surface topography on depth profiles obtained by Rutherford backscattering spectrometry J. Appl. Phys. 87 140-3
141. Sorkin G B 1991 Efficient simulated annealing on fractal energy landscapes Algorithmica 6 367-418
142. Stepanov A L, Hole D E and Townsend P D 1999 Reflectance of the dielectric layers containing metal nanoparticles for by ion implantation J. Non-Cryst. Solids 244 275-9
143. Stepanov A L, Hole D E and Bukharaev A A 2001a Interaction of high-power excimer-laser pulses with soda-lime silicate glass containing ion-implanted metal nanoparticles Vacuum 64 169-77
144. Stepanov A L, Popok V N, Hole D E and Bukharaev A A 2001b Interaction of high-power laser pulses with glasses containing implanted metallic nanoparticles Phys. Solid State 43 2192-8
145. Stoquert J P and Szorenyi T 2002 Determination of the number and size of inhomogeneities in thin films by ion beam analysis Phys. Rev. B 66 144108
146. Szilágyi E and Pászti F 1994 Theoretical calculation of the depth resolution of IBA methods Nucl. Instrum. Methods B 85 616-20
147. Szilágyi E, Pászti F and Amsel G 1995 Theoretical approximations for depth resolution calculations in IBA methods Nucl. Instrum. Methods B 100 103-21
148. Tavares C J, Rebouta L, Alves E, Barradas N P, Pacaud J and Riviére J P 2002 Study of roughness in TiAlN/Mo multilayer structures Nucl. Instrum. Methods B 188 90-5
149. Telbizova T, Chevolleau T and Möller W 2001a Nitrogen incorporation and loss during ion nitriding of Al Nucl. Instrum. Methods B 184 347-53
150. Telbizova T, Parascandola S, Prokert F, Barradas N P, Richter E and Möller W 2001b Ion nitriding of Al: growth kinetics and characterisation of the nitride layer Surf. Coatings Technol. 142 1028-33
151. Tesmer J R and Nastasi M (ed) 1995 Handbook of Modern Ion Beam Analysis (Pittsburgh: Materials Research Society) Does not include PIXE (see Mayer and Rimini)
152. Tzitzinou A, Jenneson P M, Clough A S, Keddie J L, Lu J R, Zhdan P, Treacher K E and Satgaru R 1999 Surfactant concentration and morphology at the surfaces of acrylic latex films Prog. Org. Coatings 35 89-99
153. Tirara J, Serruys Y and Trocellier P 1996 Forward Recoil Spectrometry (New York: Plenum)
154. Toal S J, Reehal H S, Webb S J, Barradas N P and Jeynes C 1999 Structural analysis of nanocrystalline SiC thin films grown on Si by ECR plasma CVD Appl. Surface Sci. 138-139 424-8
155. Uchikoga S, Lai D F, Robertson J, Milne W I, Hatzopoulos N, Yankov R A and Weiler M 1999 Low-temperature anodic oxidation of silicon using a wave resonance plasma source Appl. Phys. Lett. 75 725-7
156. 17 spin valves with nano-oxide layers Appl. Phys. Lett. 77 1020-2
157. Vieira A and Barradas N P 2000 Neural network analysis of Rutherford backscattering data Nucl. Instrum. Methods B 170 235-8
158. Vieira A and Barradas N P 2001 Composition of NiTaC films on Si using neural networks analysis of elastic backscattering data Nucl. Instrum. Methods B 174 367-72
159. Vieira A, Barradas N P and Jeynes C 2001 Error performance analysis of artificial neural networks applied to Rutherford backscattering data Surf. Interface Anal. 31 35-8
160. Vizkelethy G 1995 Nuclear Reaction Analysis; Particle-Particle Reactions ed Tesmer and Nastasi, chapter 6
161. Vonsovici A, Reed G T, Evans A G R and Namavar F 1999 Loss measurements for β-SiC-on-insulalor for high-speed silicon-based photonic devices SPIE Conf. on Si-based Optoelectronics (San Jose, California, January 1999) SPIE vol 3630, pp 115-24
162. Vredenberg A M, Polman A, Stolk P A, Snoeks E and Brongersma M L (ed) 1999 Proc. 11th Int. Conf. on Ion Beam Modification of Materials (Amsterdam, August 31-September 4, 1998) Nucl. Instrum. Methods B 148
163. Watt F and Grime G W 1987 Principles and Applications of High-Energy Ion Microbeams (Bristol: Adam Hilger)
164. Wilks Y A, Slator B M and Guthrie L M 1996 Electric Words: Dictionaries, Computers, Meanings (Cambridge MA: MIT Press)
165. Williams J S and Möller W 1978 On the determination of optimum depth-resolution conditions for Rutherford backscattering analysis Nucl. Instrum. Methods 157 213-21
166. 2 by excimer laser irradiation of Fe-57/Si bilayers Appl. Surf. Sci. 186 156-61
167. Wätjen U, Bax H and Rietveld P 1992 Evaporated and implanted reference layers for calibration in surface analysis Surf. Interface Anal. 19 253-8
168. Wätjen U and Bax H 1994 Bi-implanted silicon reference material revisited: uniformity of the remaining batch Nucl. Instrum. Methods B 85 627-32
169. Way A S, Jeynes C and Webb R P 1999 Measurement of lateral stress in argon implanted thin gold films using quartz resonator techniques Nucl. Instrum. Methods B 148 238-41
170. Wendler E, Jeynes C, Webb R P, Barradas N P, Thompson R and Smith R 1999 Hydrogen isotope profiling of functionalised polystyrene blends using RBS/ERD and RBS/NRA with simulated annealing analysis 11th AINSE Conf. Nuclear Techniques of Analysis, Lucas Heights, (Australia, 24-26 November 1999)
171. x heterostructures on a nanometer scale J. Non-Cryst. Solids 254 112-7
172. Yang C, Homman N P-O, Johanssen L and Malmqvist K G 1994 Microcharacterizing zircon mineral grain by ionoluminescence combined with PIXE Nucl. Instrum. Methods B 85 808-14
173. Young W T, Silva S R P, Anguita J V, Shannon J M, Homewood K P and Sealy B J 2000 Low temperature growth of gallium nitride Diamond Relat. Mater. 9 456-9
174. Yesil I M, Assmann W, Huber H and Löbner K E G 1998 Simulation of surface roughness effects in ERDA Nucl. Instrum. Methods B 136-138 623-7
175. Ziegler J F, Biersack J P and Littmark U 1985 The Stopping and Ranges of Ions in Solids (New York: Pergamon)
176. 3/CoFe interface Appl. Phys. Lett. 78 2911-3
177. Zinin P, Manghnani M H, Zhang X, Feldermann H, Ronning C and Hofsass H 2002 Surface Brillouin scattering of cubic boron nitride films J. Appl. Phys. 91 4196-204