Improved stoichiometry measurements using 4He elastic backscattering: experiment and simulation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 152, Issue 2, 1999, Pages 370-376

  Lennard, W N ^a   Massoumi, G R ^a   Simpson, T W ^a   Mitchell, I V ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; COMPUTER SIMULATION; HELIUM; ION BEAMS; SILICA; SILICON NITRIDE; STOICHIOMETRY;

ELASTIC SCATTERING; STOPPING POWER;

RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 0032680156     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00180-9     Document Type: Article

References (33)

1. W.K. Chu, J.W. Mayer, M.A. Nicolet (Eds.), Backscattering Spectrometry, Academic Press, New York, 1978.
2. Stock H.-R., Schulz A., Kopnarski M., Gross T. Surf. and Coatings Technol. 98:1998;918.
3. Doolittle L.R. Nucl. Instr. and Meth. B. 9:1985;344.
4. Vizkelethy G. Nucl. Instr. and Meth. B. 45:1990;1.
5. Saarilahti J., Rauhala E. Nucl. Instr. and Meth. B. 64:1992;734.
6. Kotai E. Nucl. Instr. and Meth. B. 85:1994;588.
7. M. Mayer, SIMNRA Users Guide, Technical Report IPP 9/113, Max-Planck-Institüt für Plasmaphysik, Garching, Germany, 1997.
8. J.R. Tesmer, M. Nastasi (Eds.), Handbook of Modern Ion Beam Materials Analysis, Ch. 2, Materials Research Society, Pittsburg, PA, 1995.
9. Climent-Font A., Wätjen U., Bax H. Nucl. Instr. and Meth. B. 71:1992;81.
10. Climent-Font A., Fernández-Jiménez M.T., Wätjen U., Perrière J. Nucl. Instr. and Meth. A. 353:1994;575.
11. M. Bianconi, private communication, 1998.
12. Ziegler J.F., Chu W.K. Atom. Data Nucl. Data Tables. 13:1974;463.
13. J.F. Ziegler, Helium: Stopping Powers and Ranges in All Elements, Pergamon Press, New York, 1977.
14. J.F. Ziegler, Handbook of Stopping Cross Sections for Energetic Ions in All Elements, Pergamon Press, New York, 1980.
15. J.F. Ziegler, J.P. Biersack, U. Littmark, Empirical Stopping Powers for Ions in Solids, IBM Research Report RC9250, 1982.
16. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, Pergamon Press, New York, 1985, updated version TRIM-95.
17. Konac G., Kalbitzer S., Klatt Ch., Niemann D., Stoll R. Nucl. Instr. and Meth. B. 136-138:1998;159.
18. J.R. Tesmer, M. Nastasi (Eds.), Handbook of Modern Ion Beam Materials Analysis, Ch. 12, Table 12.5, Materials Research Society, Pittsburg, PA, 1995, p. 355.
19. Cohen C., Davies J.A., Drigo A.V., Jackman T.E. Nucl. Instr. and Meth. 218:1983;147.
20. Davies J.A., Jackman T.E., Eschbach H.L., Dobma W., Wätjen U., Chivers D. Nucl. Instr. and Meth. B. 15:1986;238.
21. Jackman T.E., Davies J.A., Chivers D. Nucl. Instr. and Meth. B. 19/20:1987;345.
22. J.R. Tesmer, M. Nastasi (Eds.), Handbook of Modern Ion Beam Materials Analysis, Ch. 12, Section 12.2.1, Materials Research Society, Pittsburg, PA, 1995.
23. Leavitt J.A., Stoss P., Cooper D.B., Seerveld J.L., McIntyre L.C. Jr., Davis R.E., Gutierrez S., Reith T.M. Nucl. Instr. and Meth. B. 15:1986;296.
24. Leavitt J.A., McIntyre L.C. jr., Stoss P., Ashbaugh M.D., Dezfouly-Arjomandy B., Hinedi M.F., Van Zijll G. Nucl. Instr. and Meth. B. 35:1988;333.
25. L'Ecuyer J., Davies J.A., Matsunami N. Nucl. Instr. and Meth. 160:1979;337.
26. Andersen H.H., Besenbacher F., Loftager P., Möller W. Phys. Rev. A. 21:1980;1891.
27. Szilágyi E., Wielunski L.S., Pászti F. Nucl. Instr. and Meth. B. 136-138:1998;701.
28. Wielunski L.S., Szilágyi E., Harding G.L. Nucl. Instr. and Meth. B. 136-138:1998;713.
29. Lennard W.N., Geissel H., Winterbon K.B., Phillips D., Alexander T.K., Forster J.S. Nucl. Instr. and Meth. A. 248:1986;454.
30. I. Vickridge, private communication, 1998.
31. J.R. Tesmer, M. Nastasi (Eds.), Handbook of Modern Ion Beam Materials Analysis, Ch. 5, Materials Research Society, Pittsburg, PA, 1995.
32. Wenzel W.A., Whaling W. Phys. Rev. 87:1952;449.
33. Klatt Ch., Kalbitzer S., Konac G. Nucl. Instr. and Meth. B. 136-138:1998;153.