Structural properties of ion beam synthezised iron-cobalt silicide

Journal of Physics D: Applied Physics

Volumn 29, Issue 7, 1996, Pages 1822-1830

  Harry, M A ^a   Curello, G ^a   Finney, M S ^a   Reeson, K J ^a   Sealy, B J ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT; CRYSTALS; ION BEAMS; ION IMPLANTATION; IRON; PHYSICAL PROPERTIES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

BURIED TERNARY SILICIDES; CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; CRYSTAL QUALITY; IMPLANT ORDER; ION BEAM SYNTHESIS; IRON COBALT SILICIDES; STRUCTURAL PROPERTIES; SURFACE LAYERS;

SEMICONDUCTING FILMS;

EID: 0030197113     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/7/017     Document Type: Article

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