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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 188, Issue 1-4, 2002, Pages 90-95

Study of roughness in Ti0.4Al0.6N/Mo multilayer structures

(6) Tavares, C J a Rebouta, L a Alves, E b,c Barradas, N P b,c Pacaud, J d Riviere J P d

a UNIVERSITY OF MINHO (Portugal)

b INSTITUTO TECNOLÓGICO E NUCLEAR (Portugal)

c CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA (Portugal)

d UNIVERSITÉ DE POITIERS (France)

Author keywords

Interfacial roughness; Multilayer; Rutherford backscattering spectrometry; Surface roughness; TiAlN Mo

Indexed keywords

ATOMIC FORCE MICROSCOPY; BACKSCATTERING; COATING TECHNIQUES; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; SPECTROMETRY; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

INTERFACIAL ROUGHNESS; TOPOGRAPHY;

MULTILAYERS;

EID: 0036534950 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)01026-6 Document Type: Conference Paper

Times cited : (15)

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