Compact broad range magnetic spectrometer for use in ion beam analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 1177-1182

  Lanford, W A ^a   Anderberg, B ^b   Enge, H ^c   Hjorvarsson, B ^d  

^a STATE UNIVERSITY OF NEW YORK   (United States)

^b AMACC AB   (Sweden)

^c Deuteron Inc   (United States)

^d UPPSALA UNIVERSITY   (Sweden)

Author keywords

High resolution; Magnetic spectrometer; RBS

Indexed keywords

HELIUM; ION BEAMS; MAGNETIC DEVICES; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

ION BEAM ANALYSIS (IBA); MAGNETIC SPECTROMETERS;

SPECTROMETERS;

EID: 0032020668     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00734-9     Document Type: Article

References (15)

1. S. Rubin, Phys. Rev. 18 (1950) 83; S. Rubin, T.O. Passell, L.E. Bailey, Anal. Chem. 29 (1957) 736.
2. S. Rubin, Phys. Rev. 18 (1950) 83; S. Rubin, T.O. Passell, L.E. Bailey, Anal. Chem. 29 (1957) 736.
3. H.A. Enge, W.W. Buechner, Sperduto, Phys. Rev. 88 (1952) 963; H.A. Enge, Ph.D. Thesis, Bergen, 1954.
4. H.A. Enge, W.W. Buechner, Sperduto, Phys. Rev. 88 (1952) 963; H.A. Enge, Ph.D. Thesis, Bergen, 1954.
5. H.A. Enge, W.A. Lanford, Apparatus for detection of surface contamination on silicon wafers, US Patent Application, 12 April, 1996.
6. W. Gibson, private communication, 1977.
7. W.M. Arnoldbik, W. Wolfswinkel, D.K. Inia, V.C.G. Verleun, S. Lobner, J.A. Reinders, F. Labohm, D.O. Boerma, Nucl. Instr. and Meth. B 118 (1996) 566.
8. H.A. Enge, Nucl. Instr. and Meth. 162 (1979) 161.
9. H.A. Enge, Scientific Inst. 29 (1958) 885.
10. W. Bertozzi, M.V. Hynes, C.P. Sargent, W. Turchinetz, C. Willliamson, Nucl. Instr. and Meth. 162 (1979) 211.
11. G.M. Crawley, E. Kashy, W. Lanford, H.G. Blosser, Phys. Rev. C 8 (1973) 2477.
12. J.C. Armstrong, J. Mullendore, W. Harris, J.B. Marion, Proc. Phys. Soc. (London) 86 (1965) 1283.
13. M. Krammer, Nucl. Instr. and Meth. A 386 (1997) 193; A. Kjensmo. IDE AS Oslo, Norway, 1997.
14. M. Krammer, Nucl. Instr. and Meth. A 386 (1997) 193; A. Kjensmo. IDE AS Oslo, Norway, 1997.
15. B. Hjorvarsson, Private communication, Uppsala University, 1996.