Fitting of RBS data including roughness: Application to Co/Re multilayers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 247-251

  Barradas, N P ^a,b  

^a INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^b CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

Author keywords

Multilayers; Roughness; Rutherford backscattering; Thin films

Indexed keywords

DATA REDUCTION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS;

ROUGHNESS PARAMETERS;

MULTILAYERS;

EID: 0036569668     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01202-2     Document Type: Conference Paper

References (15)