Simulation of surface roughness effects in ERDA

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 623-627

  Yesil, I M ^a   Assmann, W ^a   Huber, H ^a   Lobner K E G ^a  

^a UNIVERSITY OF MUNICH   (Germany)

Author keywords

Elastic recoil detection; Ion beam analysis; Simulation; Surface roughness

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; IODINE; ION BEAMS; REACTIVE ION ETCHING; SILICON WAFERS;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); ION BEAM ANALYSIS (IBA);

SURFACE ROUGHNESS;

EID: 0032021239     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00860-4     Document Type: Article

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