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Volumn 81, Issue 27, 2002, Pages 5249-5251

Patterned low temperature copper-rich deposits using inkjet printing

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; INK; PIEZOELECTRIC MATERIALS; PRINTING; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 0346034855     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1481985     Document Type: Article
Times cited : (74)

References (31)
  • 16
    • 0000962055 scopus 로고
    • VTMS(Cu)hfac was synthesized according to a previously published procedure; M.J. Hampden-Smith and T.T. Kodas, Polyhedron 14, 699 (1995).
    • (1995) Polyhedron , vol.14 , pp. 699
    • Hampden-Smith, M.J.1    Kodas, T.T.2
  • 18
    • 0345865715 scopus 로고    scopus 로고
    • note
    • A stainless steel nozzle plate with a 300 μm ejection hole was used to produce drop-on-demand jetting. Using 2 mm head pressure of ink and applying a square wave (frequency 100 Hz. amplitude 4.0 V. amplitude offset 2.0 V. duty cycle 5% of entire wave) on the piezoactuator, produced discrete droplets of the copper precursor. The piezo is a custom-built PZT piezoelectric ceramic unimorph research printhead operating in the bend mode. Drop generation was computer controlled (WaveCad 7223pc Version 1.0; MS-Dos platform. Tabor Electronics Ltd., UK). The pulse was amplified using a 500 V Linear Amplifier (Bournlea Instruments Ltd., UK).
  • 20
    • 0347757375 scopus 로고    scopus 로고
    • note
    • The energy-dispersive analysis of x rays was conducted using a RONTEC GmbH with light element UHV Dewar detector. EDWIN WinTools by RONTEC GmbH (version: 3.1 ENG) was the processing software. Scanning electron microscopy was conducted using a LEICA Stereo 430 instrument, with a 20 kV beam at a working distance of 25 mm. Images were processed using Leo 400 series software.
  • 21
    • 0347127112 scopus 로고    scopus 로고
    • note
    • The optical interferometric height profile analysis: Zygo NewView 200 System (OMP-0407C); Michelson and Mirau interferometric objectives; 50X magnification at full zoom (2.0) gave an average horizontal resolution of 0.2 μm (320×240 pixel resolution). MetroPro software was used.
  • 30
    • 0035859496 scopus 로고    scopus 로고
    • N. P. Barradas, J. Phys. D 34, 2109 (2001). Due to the surface roughness an additional parameter is introduced. We could further analyze the RBS spectra for surface roughness but the results would be speculative in the absence of additional information on surface topography. In any case, the copper content at depth in the present analysis is underestimated because we ignore sample roughness.
    • (2001) J. Phys. D , vol.34 , pp. 2109
    • Barradas, N.P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.