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Volumn 190, Issue 1-4, 2002, Pages 231-236
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RBS without humans
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Author keywords
Artificial neural networks; Data analysis; Ion beam analysis; RBS
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Indexed keywords
ALGORITHMS;
DATA REDUCTION;
ION BEAMS;
NEURAL NETWORKS;
OPTIMIZATION;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SUBSTRATES;
ION BEAM ANALYSIS;
SEMICONDUCTING SILICON COMPOUNDS;
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EID: 0036569461
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(01)01249-6 Document Type: Conference Paper |
Times cited : (8)
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References (8)
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