Processing and characterization of sol-gel deposited Ta2O5 and TiO2-Ta2O5 dielectric thin films

Solid-State Electronics

Volumn 43, Issue 6, 1999, Pages 1095-1099

  Cappellani, A ^a   Keddie, J L ^a   Barradas, N P ^a   Jackson, S M ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); ELLIPSOMETRY; PERMITTIVITY MEASUREMENT; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SIMULATED ANNEALING; SOL-GELS; TANTALUM COMPOUNDS; THIN FILMS; TITANIUM DIOXIDE;

SPECTROSCOPIC ELLIPSOMETRY;

DIELECTRIC FILMS;

EID: 0032684609     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(99)00031-3     Document Type: Article

References (16)

1. Kotecki DE. Semiconductor international, November 1996. p. 109.
2. Streiffer S.K., Kingon A.I. Nature. 377:1995;194.
3. Ohji Y., Matsui Y. IEDM. 111:1995.
4. Sun S.C., Chen T.F. IEDM. 12.4:1994.
5. Cava R.F., Peck W.F. Jr., Krajewski J.J. Nature. 377:1995;215.
6. Brinker C.J., Scherer G.W. Sol-gel science. 1990;Academic Press.
7. Rehg T.J., Ochoa-Tapia J.A., Knoesen A., Higgins B.G. Appl Optics. 28:1989;5215.
8. Keddie J.L., Braun P.V., Giannelis E.P. J Am Ceram Soc. 77:1994;1592.
9. Aarts E., Korst J. Simulated annealing and Boltzmann machines: a stochastic approach to combinatorial optimization and neural computing. 1989;Wiley, Chichester.
10. Barradas N.P., Jeynes C., Webb R.P. Appl Phys Lett. 71:1997;291.
11. Barradas N.P., Marriott P.K., Jeynes C., Webb R.P. Nucl Instr Methods B. 136-138:1998;1157.
12. Barradas N.P., Jeynes C., Harry M.A. Nucl Instr Methods B. 136-138:1998;1163.
13. Barradas N.P., Jeynes C., Jackson S.M. Nucl. Instr. Methods B. 136-138:1998;1168.
14. Jeynes C., Jafri Z.H., Webb R.P., Kimber A.C., Ashwin M.J. Surf Interface Anal. 25:1997;254.
15. Pignolet A., Mohan Rao G., Krupanidhi S.B. Thin Solid Films. 258:1995;230-235.
16. Burte E.P., Rausch N. J Non-Cryst Solids. 187:1995;425.