Accurate RBS measurements of the indium content of InGaAs thin films

Surface and Interface Analysis

Volumn 25, Issue 4, 1997, Pages 254-260

  Jeynes, C ^a   Jafri, Z H ^a,c   Webb, R P ^a   Kimber, A C ^a   Ashwin, M J ^b  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

^c UNIVERSITY OF ENGINEERING AND TECHNOLOGY   (Pakistan)

Author keywords

Absolute composition determination; InGaAs; Measurement accuracy; RBS

Indexed keywords

CARBON; COMPOSITION; MEASUREMENT ERRORS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DOPING; THIN FILMS;

ABSOLUTE COMPOSITION DETERMINATION; MEASUREMENT ACCURACY;

SEMICONDUCTING FILMS;

EID: 0031124919     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1096-9918(199704)25:4<254::aid-sia232>3.0.co;2-f     Document Type: Article

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