Comparison of in situ polishing and ion beam sputtering as surface preparation methods for XPS analysis of PVD coatings

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 473-477

  Baker, M A ^a   Greaves, S J ^a   Wendler, E ^a   Fox, V ^b  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b TEER COATINGS LTD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLISHING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION; SURFACE CLEANING; TITANIUM NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

ION BEAM SPUTTERING;

CERAMIC COATINGS;

EID: 0034515520     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01272-4     Document Type: Article

References (15)

1. Sundgren J.E., Rockett A., Greene J.E. J. Vac. Sci. Technol. A. 4:(6):1986;2770.
2. Strydom I.LeR., Hofmann S. J. Elec. Spec. Rel. Phenom. 56:1991;85.
3. Burrow B.J., Morgan A.E., Ellwanger R.C. J. Vac. Sci. Technol. A. 4:(6):1986;2463.
4. Bertóti I., Mohai M., Sullivan J.L., Saied S.O. Surf. Interf. Anal. 21:1994;467.
5. Baker M.A., Hammer P. Surf. Interf. Anal. 25:1997;629.
6. Baker M.A., Gilmore R., Lenardi C., Gissler W. Appl. Surf. Sci. 150:1999;255.
7. Zhu W., deVries J.E., Tamor M.A., Simon K.Y. Ng. Surf. Coat. Technol. 71:1995;37.
8. Baker M.A., Mollart T.P., Gibson P.N., Gissler W. J. Vac. Sci. Technol. A. 15:1997;284.
9. Wagner C.D. Surf. Interf. Anal. 3:1981;211.
10. Amirikas R., Jamieson D.N., Dooley S.P. Nucl. Instr. Meth. B77:1993;110.
11. Rauhalla E. Nucl. Instr. Meth. B40-41:1989;790.
12. NIST X-ray Photoelectron Spectroscopy Database, Version 1.0, NIST, Gaithersburg, MD 20899, USA, 1989.
13. Robinson K.S., Sherwood P.M.A. Surf. Interf. Anal. 6:1983;261.
14. Barradas N.P., Jeynes C., Webb R.P. Appl. Phys. Lett. 71:1997;291.
15. Renevier N.M., Lobiondo N., Fox V.C., Teer D.G. J. Hampshire Surf. Coat. Technol. 123:2000;84.