Application of heavy-ion RBS to compositional analysis of thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 297-300

  Niwa, Hiroaki ^a   Nakao, Setsuo ^a   Saitoh, Kazuo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

C; Co; Compositional analysis; Cu; Heavy ion beam; Island growth; Ni Cr; O; RBS analysis; Si; Thin film

Indexed keywords

CARBON; COBALT; COMPOSITION EFFECTS; COPPER; FUNCTIONS; MATHEMATICAL MODELS; NICKEL ALLOYS; OXYGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SPECTROMETRY; SUBSTRATES;

HEAVY ION BEAMS; RUTHERFORD BACKSCATTERING SPECTROMETRY;

THIN FILMS;

EID: 0032021059     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00696-4     Document Type: Article

References (6)

1. W.-K. Chu, J.W. Mayer, M.-A. Nicolet, Backscattering Spectrometry, Academic Press, New York, 1978.
2. D.J. O'Connor, T. Chunyu, Nucl. Instr. and Meth. B 36 (1989) 178.
3. Y. Horino, A. Chayahara, M. Satou, M. Takai, Nucl. Instr. and Meth. B 54 (1991) 269.
4. J.A. Knapp, J.C. Banks, Nucl. Instr. and Meth. B 79 (1993) 457.
5. J.R. Liu, Z.S. Zheng, Z.H. Zheng, W.K. Chu, Nucl. Instr. and Meth. B 85 (1994) 51.
6. H. Niwa, K. Saitoh, S. Tanemura, S. Nakao, Rep. Nat. Ind. Res. Inst. Nagoya 45 (1996) 123.