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Volumn 136-138, Issue , 1998, Pages 1163-1167
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RBS/simulated annealing analysis of iron-cobalt suicides
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Author keywords
Iron cobalt silicide; Rutherford backscattering spectrometry; Simulated annealing
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Indexed keywords
ANNEALING;
COBALT;
ION IMPLANTATION;
IRON;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SIMULATED ANNEALING;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
COBALT SILICIDE;
IRON SILICIDE;
SILICON COMPOUNDS;
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EID: 0032019470
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(97)00809-4 Document Type: Article |
Times cited : (43)
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References (14)
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