Synthesis of amorphous FeSi2 by ion beam mixing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 188, Issue 1-4, 2002, Pages 166-169

  Milosavljevic, M ^a,b   Shao, G ^a   Bibic, N ^b   McKinty, C N ^a   Jeynes, C ^a   Homewood, K P ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Amorphous semiconductors; Cross sectional TEM; Fe silicides; Ion beam mixing; Photo absorption

Indexed keywords

AMORPHOUS MATERIALS; DIFFUSION; IRON COMPOUNDS; POSITIVE IONS; SEMICONDUCTING SILICON; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS SEMICONDUCTORS; ION BEAM MIXING;

ION BEAMS;

EID: 0036534072     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01068-0     Document Type: Conference Paper

References (19)