Influence of surface topography on depth profiles obtained by Rutherford backscattering spectrometry

Journal of Applied Physics

Volumn 87, Issue 1, 2000, Pages 140-143

  Slotte, J ^a   Laakso, A ^a   Ahlgren, T ^b   Rauhala, E ^b   Salonen, R ^b   Raisanen J ^c   Simon, A ^d   Uzonyi, I ^d   Kiss, A Z ^d   Somorjai, E ^d  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

^c UNIVERSITY OF JYVÄSKYLÄ   (Finland)

^d INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001388487     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371835     Document Type: Article

References (14)

1. W. Chu, J. W. Mayer, and M. A. Nicolet, Backscattering Spectrometry (Academic, New York, 1978), p. 218.
2. S. U. Campisano, G. Foti, F. Grassi, and E. Rimini, Thin Solid Films 25, 431 (1975).
3. J. E. E. Baglin, M. H. Tabacniks, and A. J. Kellock, Nucl. Instrum. Methods Phys. Res. B 136-138, 241 (1998).
4. H. Metzner, M. Gossla, and T. Hahn, Nucl. Instrum. Methods Phys. Res. B 124, 567 (1997).
5. H. Metzner, Th. Hahn, M. Gossla, J. Conrad, and J.-H. Bremer, Nucl. Instrum. Methods Phys. Res. B 134, 249 (1998).
6. O. Tadanaga, Y. Koide, K. Hashimoto, T. Oku, N. Teraguchi, Y. Tomomura, A. Suzuki, and M. Murakami, Jpn. J. Appl. Phys., Part 1 35, 1657 (1996).
7. R. Martinez, M. Schmeits, and R. Evrad, Adv. Mater. Opt. Electron. 3, 81 (1994).
8. F. Xu, M. Vos, J. H. Weaver, and H. Cheng, Phys. Rev. B 38, 13418 (1988).
9. B. A. Morgan, K. Ring, K. Kavanagh, A. Talin, R. Williams, T. Yasuda, T. Yasui, and Y. Segawa, J. Appl. Phys. 79, 1532 (1996).
10. J. Fijol, L. Calhoun, R. Park, and P. Holloway, J. Electron. Mater. 24, 143 (1995).
11. J. Slotte, R. Salonen, T. Ahlgren, E. Rauhala, J. Keinonen, J. Räisänen, P. Uusimaa, A. Salokatve, M. Pessa, and A. Laakso, J. Appl. Phys. 85, 799 (1999).
12. J. Saarilahti and E. Rauhala, Nucl. Instrum. Methods Phys. Res. B 64, 734 (1992).
13. I. Rajta, I. Borbély-Kiss, Gy. Mórik, L. Bartha, E. Koltay, and Á. Z. Kiss, Nucl. Instrum. Methods Phys. Res. B 109/110, 148 (1996).
14. J. Slotte, R. Salonen, T. Ahlgren, J. Räisńen, E. Rauhala, and P. Uusimaa, Appl. Phys. Lett. 72, 2553 (1998).