Micromachined CMOS calorimetric chemical sensor with on-chip low noise amplifier

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 547-551

  Koll, A ^a   Schaufelbuhl, A ^a   Schneeberger, N ^a   Munch, U ^a   Brand, O ^a   Baltes, H ^a   Menolfi, C ^a   Huang, Q ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CALORIMETRY; CMOS INTEGRATED CIRCUITS; DESORPTION; DIFFERENTIAL AMPLIFIERS; ENTHALPY; MICROMACHINING; MICROPROCESSOR CHIPS; VOLATILE ORGANIC COMPOUNDS;

MICROMACHINED CALORIMETRIC CHEMICAL SENSORS; THERMOVOLTAGES;

CHEMICAL SENSORS;

EID: 0032689743     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746887     Document Type: Conference Paper

References (7)