A capacitance-type chemical sensor that employs VAPO-5, MnAPO-5 and MAPO-36 molecular sieves as the dielectric phase

Sensors and Actuators, B: Chemical

Volumn 42, Issue 1, 1997, Pages 67-79

  Balkus Jr , Kenneth J ^a   Ball, Laura J ^a   Gimon Kinsel, Mary E ^a   Mark Anthony, J ^b   Gnade, Bruce E ^b  

^a UNIVERSITY OF TEXAS AT DALLAS   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

Capacitance; Laser ablation; Molecular sieves; Sensor

Indexed keywords

CAPACITANCE; CAPACITORS; DIELECTRIC MATERIALS; LASER ABLATION; MANGANESE COMPOUNDS; MOLECULAR SIEVES; SILICON WAFERS; THIN FILMS; TITANIUM NITRIDE; VANADIUM COMPOUNDS;

MAGNESIUM ALUMINUM PHOSPHATE; MANGANESE ALUMINUM PHOSPHATE; VANADIUM ALUMINUM PHOSPHATE;

CHEMICAL SENSORS;

EID: 0031186962     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80314-0     Document Type: Article

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