Silicon thin film sensor for measurement of dissolved oxygen

Sensors and Actuators, B: Chemical

Volumn 43, Issue 1-3, 1997, Pages 40-44

  Wittkampf, Michael ^a   Chemnitius, Gabriel Christine ^a   Cammann, Karl ^a   Rospert, Matthias ^b   Mokwa, Wilfried ^b  

^a ICB Institut fur Chemo und Biosensorik GmbH   (Germany)

^b FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Amperometry; Clark type oxygen sensor; Cyclic voltammetry

Indexed keywords

AMPEROMETRIC SENSORS; CURRENT DENSITY; CYCLIC VOLTAMMETRY; ELECTROCHEMICAL ELECTRODES; ELECTROCHEMISTRY; GAS PERMEABLE MEMBRANES; SEMICONDUCTING SILICON; SIGNAL TO NOISE RATIO; THIN FILM DEVICES;

CLARK TYPE OXYGEN SENSORS; ELECTRODE SPACINGS; MICROELECTRODE ARRAY; SILICON THIN FILM TRANSDUCER;

DISSOLVED OXYGEN SENSORS;

EID: 0031222465     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00138-X     Document Type: Article

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