A flip-chip packaged CMOS chemical microsystem for detection of volatile organic compounds

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3328, Issue , 1998, Pages 223-232

  Koll, Andreas ^a   Kawahito, Shoji ^b   Mayer, Felix ^a   Hagleitner, Christoph ^a   Scheiwiller, D ^a   Brand, Oliver ^a   Baltes, Henry ^a  

^a ETH ZURICH   (Switzerland)

^b Toyohashi UT ^*  (Japan)

Author keywords

Capacitive microsensor array; Chemical microsensor; CMOS chemical microsystem; CMOS electronic nose; Sigma delta modulator; Volatile organic compounds

Indexed keywords

ARTIFICIAL ORGANS; CAPACITANCE; CAPACITORS; CERAMIC CAPACITORS; CHEMICAL COMPOUNDS; CONCRETE BRIDGES; DELTA MODULATION; DELTA SIGMA MODULATION; DIELECTRIC DEVICES; ELECTRONIC EQUIPMENT; FLIP CHIP DEVICES; GAS CHROMATOGRAPHY; INTELLIGENT STRUCTURES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MICROSYSTEMS; MODULATION; MODULATORS; NANOSENSORS; THICKNESS MEASUREMENT; VAPORS; VOLATILE ORGANIC COMPOUNDS;

CAPACITIVE MICROSENSOR ARRAY; CHEMICAL MICROSENSOR; CMOS CHEMICAL MICROSYSTEM; CMOS ELECTRONIC NOSE; SIGMA-DELTA MODULATOR;

ORGANIC COMPOUNDS;

EID: 58649121045     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.320173     Document Type: Conference Paper

References (9)

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