Silicon hotplates for metal oxide gas sensor elements

Microsystem Technologies

Volumn 3, Issue 4, 1997, Pages 183-190

  Sberveglieri, G ^a   Hellmich, W ^a   Muller G ^b  

^a UNIVERSITY OF BRESCIA   (Italy)

^b DAIMLER AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000077361     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050078     Document Type: Article

References (20)

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