A chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors

Applied Physics A: Materials Science and Processing

Volumn 66, Issue SUPPL. 1, 1998, Pages

  Lang, H P ^a,b   Berger, R ^a,b   Battiston, F ^b   Ramseyer, J P ^b   Meyer, E ^b   Andreoli, C ^a   Brugger, J ^a   Vettiger, P ^a   Despont, M ^a   Mezzacasa, T ^c   Scandella, L ^c   Guntherodt H J ^b   Gerber, Ch ^a   Gimzewski, J K ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAY SENSORS; CANTILEVER ARRAYS; CHEMICAL INTERACTIONS; DEFLECTION TECHNIQUES; GAS FLOWS; MICROFABRICATED ARRAYS; RESONANCE FREQUENCY SHIFT; SENSOR MATERIALS; STATIC BENDING; SURFACE STRESS;

ADSORPTION; ATOMIC FORCE MICROSCOPY; NANOCANTILEVERS; PLATINUM; RESONANCE; VAPORS;

SENSORS;

EID: 73149087426     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s003390051100     Document Type: Article

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