Fabrication and packaging of integrated chemo-optical sensors

Sensors and Actuators, B: Chemical

Volumn 35, Issue 1-3, 1996, Pages 234-240

  Heideman, R G ^a   Veldhuis, G J ^a   Jager, E W H ^a   Lambeck, P V ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Chemo optical sensor; Electro optic; Fiber to chip coupling; Mach Zehnder interferometer; Phase modulation; Zinc oxide (ZnO)

Indexed keywords

CHEMICAL SENSORS; ELECTRONICS PACKAGING; ELECTROOPTICAL EFFECTS; INTERFEROMETERS; OPTICAL WAVEGUIDES; PHASE MODULATION; SILICON SENSORS; WAVEGUIDE COUPLERS; ZINC OXIDE;

CHEMOOPTICAL SENSORS; FIBER TO CHIP COUPLING; MACH ZEHNDER INTERFEROMETERS;

FIBER OPTIC CHEMICAL SENSORS;

EID: 0030233905     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80061-5     Document Type: Article

References (17)

1. P.V. Lambeck, Integrated opto-chemical sensors, Sensors and Actuators B, 8 (1991) 103-116.
2. O. Parriaux, in O.S. Wolfbeiss (ed.), Fiberoptic Chemical Sensors and Biosensors, Ch. 4., CRC Press, Boca Raton, FL, 1991.
3. W. Lukosz, Principles and sensitivities of integrated optical and surface plasmon sensors for direct affinity sensing and immunosensing, Biosensors and Bioelectronics, 6 (1991) 215-225.
4. R.G. Heideman, R.P.H. Kooyman and J. Greve, Performance of a highly sensitive optical waveguide Mach-Zehnder interferometer immunosensor, Sensors and Actuators B, 10 (1993) 209-217.
5. J. van Gent, Surface Plasmon resonance-based chemo-optical sensors, Ph.D. Thesis, University of Twente, 1990.
6. R.G. Heideman, R. Lammers and P.V. Lambeck, Electro-optical phase modulation in zinc oxide (ZnO), Proc. National Sensor Conference, Delft, The Netherlands, 1996, pp. 231-234.
7. P.V. Lambeck, R.G. Heideman and T.J. Ikkink, Phase-modulated Mach-Zehnder interferometer for sensor applications, Proc. 10th Nordic Baltic Conf., Finland, 1996.
8. O.G. Ramer, Single-mode fiber-to-channel waveguide coupling, J. Opt. Commun., 2 (1981) 122-127.
9. G.E. Henein, J.V. Gates, L.J. Mulligan, H.M. Presby and J.F. de Jong, Fiber to laser coupling on silicon optical bench platform, Proc. Integrated Photonics Research, Boston, MA, 1996, pp. 396-399.
10. R. Moosburger, B. Schüppert, U. Fisher and K. Petermann, Passive alignment technique for all-silicon integrated optics, Proc. Integrated Photonics Research, Boston, MA, 1996, pp. 565-568.
11. O.J. Glembochi and R.E. Stahlbush, Bias-dependent etching of silicon in aqueous KOH, J. Electrochem. Soc., 132 (1985) 145-158.
12. R.G. Heideman, R.P.H. Kooyman and J. Greve, Immunoreactivity of adsorbed anti human chorionic gonadotropin (αhCG) studied with an optical waveguide interferometric sensor, Biosensors Bioelectron., 9 (1994) 33-43.
13. K. Tiefentahler and W. Lukosz, Sensitivity of grating couplers as integrated-optical chemical sensors, J. Opt. Soc. Am. B., 6 (1989) 209-220.
14. L.B. Soldano and E.C.M. Pennings, Optical multi-mode interference devices based on self-imaging: principles and applications, J. Lightwave Technol., 13 (1995) 615-627.
15. R.G. Heideman, P.V. Lambeck and J.G.E. Gardeniers, High quality ZnO layers with adjustable refractive indices for integrated optics applications, Opt. Mater., 4 (1995) 741-755.
16. G.T. Reed, Methods of measurement of passive integrated optical waveguides, Proc. IEE Colloquium on Measurements on Optical Devices, Digest No. 210, London, UK, 1992, pp. 2/1-7.
17. R.G. Heideman, R.P.H. Kooyman and J. Greve, A simple interferometer for evanescent field refractive index sensing as a feasibility study for an immunosensor, Appl. Opt., 30 (1991) 1474-1479.