Single-Chip CMOS Capacitive Gas Sensor for Detection of Volatile Organic Compounds

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1428-1431

  Hagleitner, C ^a   Hierlemann, A ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Capacitive sensor; Gas sensor; Microsensor; Sensor interface circuitry

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; DATA PROCESSING; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; MICROPROCESSOR CHIPS; MICROSENSORS; VOLATILE ORGANIC COMPOUNDS;

CAPACITIVE SENSORS; SENSOR INTERFACE CIRCUITRY;

CHEMICAL SENSORS;

EID: 1542330989     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. G. Harsanyi (ed.), Polymer films in sensor applications, Technomic Publishing, Lancaster, Basel, 1995.
2. A. Koll, CMOS Capacitive Chemical Microsystems for Volatile Organic Compounds, Ph. D. thesis ETH Zurich Nr. 13460, 1999.
3. B. Souloff, "Integrated Surface Micromachined Gyro and Accelerometers for Automotive Sensor Applications", Advanced Microsystems for Automotive Applications, pp. 262-270, 1999.
4. P. Malcovati, CMOS Thermoelectric Sensor Interfaces, Ph.D. thesis ETH Zurich Nr. 11424, 1996.