CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors

IEEE Journal of Solid-State Circuits

Volumn 37, Issue 12, 2002, Pages 1867-1878

  Hagleitner, Christoph ^a   Lange, Dirk ^a   Hierlemann, Andreas ^a   Brand, Oliver ^a   Baltes, Henry ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Chemical sensors; CMOS MEMS; Integrated sensor; Interface circuitry; Low noise amplifier; Monolithic gas sensor; Oscillator; SD modulator; Temperature sensor; Volatile organic compounds (VOCs)

Indexed keywords

CAPACITANCE; CHEMICAL SENSORS; GAS DETECTORS; MICROMACHINING; MICROSENSORS; OSCILLATORS (ELECTRONIC); VOLATILE ORGANIC COMPOUNDS;

INTEGRATED SENSORS;

CMOS INTEGRATED CIRCUITS;

EID: 0036908738     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSSC.2002.804359     Document Type: Conference Paper

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