An overview of micromachined platforms for thermal sensing and gas detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3046, Issue , 1997, Pages 273-284

  Manginell, Ronald P ^a   Smith, James H ^a   Ricco, Antonio J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Gas sensor; Heat transfer; Microbridge; Microhotplate; Thermal sensor

Indexed keywords

CHEMICAL SENSORS; GAS DETECTORS; GASES; HEAT CONDUCTION; HEAT TRANSFER; METALS; MICROMACHINING;

CONVECTION AND CONDUCTION; HEAT TRANSFER CHARACTERISTICS; HEAT TRANSFER PROBLEMS; MICRO HOTPLATE; MICRO-BRIDGE; MICROMACHINED FLOW SENSOR; THERMAL CONDUCTIVITY SENSORS; THERMAL SENSORS;

THERMAL CONDUCTIVITY OF GASES;

EID: 57649121289     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.276616     Document Type: Conference Paper

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