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Volumn 33, Issue 1-3, 1996, Pages 142-146

Optimized temperature-pulse sequences for the enhancement of chemically specific response patterns from micro-hotplate gas sensors

Author keywords

Gas sensors; Micro hotplates; Micromachining; Temperature programming; Tin oxide

Indexed keywords


EID: 0041577551     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-4005(96)01821-7     Document Type: Article
Times cited : (96)

References (10)
  • 1
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    • Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
    • J.S. Suehle, R.E. Cavicchi, M. Gaitan and S. Semancik, Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing, IEEE Electron Device Lett., 14 (1993) 118.
    • (1993) IEEE Electron Device Lett. , vol.14 , pp. 118
    • Suehle, J.S.1    Cavicchi, R.E.2    Gaitan, M.3    Semancik, S.4
  • 3
    • 0025210817 scopus 로고
    • Carbon monoxide gas detector with shortened detecting cycle
    • T. Oyabu, Y. Matuura and R. Murai, Carbon monoxide gas detector with shortened detecting cycle, Sensors and Actuators B, 1 (1990) 218.
    • (1990) Sensors and Actuators B , vol.1 , pp. 218
    • Oyabu, T.1    Matuura, Y.2    Murai, R.3
  • 5
    • 0025212837 scopus 로고
    • Effect of water vapour on the CO response behaviour of tin dioxide sensors in constant temperature and temperature-pulsed modes of operation
    • P. Romppainen, V. Lantto and S. Leppavuori, Effect of water vapour on the CO response behaviour of tin dioxide sensors in constant temperature and temperature-pulsed modes of operation, Sensors and Actuators B, 1 (1990) 73.
    • (1990) Sensors and Actuators B , vol.1 , pp. 73
    • Romppainen, P.1    Lantto, V.2    Leppavuori, S.3
  • 6
    • 0026155601 scopus 로고
    • The influence of relative humidity on the response of tin oxide gas sensors to carbon monoxide
    • P. VanGeloven, M. Honore, J. Roggen, S. Leppavuori and T. Rantala, The influence of relative humidity on the response of tin oxide gas sensors to carbon monoxide, Sensors and Actuators B, 4 (1991) 185.
    • (1991) Sensors and Actuators B , vol.4 , pp. 185
    • VanGeloven, P.1    Honore, M.2    Roggen, J.3    Leppavuori, S.4    Rantala, T.5
  • 8
    • 49249142162 scopus 로고
    • 2 gas sensor, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, 1991, p. 157; T. Seiyama, Surf. Sci., 86 (1979) 335.
    • (1979) Surf. Sci. , vol.86 , pp. 335
    • Seiyama, T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.