Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS

Sensors and Actuators, A: Physical

Volumn 95, Issue 2-3, 2002, Pages 212-221

  Xie, Huikai ^a   Fedder, Gary K ^a,b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Capacitive sensing; CMOS MEMS; Comb drive; Inertial sensors; Out of plane microactuation

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; ELECTROSTATIC ACTUATORS; GYROSCOPES; MICROMACHINING; MICROSENSORS; SENSITIVITY ANALYSIS;

CAPACITIVE SENSING; INERTIAL SENSORS; INTERDIGITATED COMB DRIVES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036143271     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00740-3     Document Type: Article

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