Fabry-Perot cavity chemical sensors by silicon micromachining techniques

Applied Physics Letters

Volumn 74, Issue 3, 1999, Pages 445-447

  Han, Jaeheon ^a  

^a Kangnam University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000110318     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123056     Document Type: Article

References (9)

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