Si-planar-pellistor: Designs for temperature modulated operation

Sensors and Actuators, B: Chemical

Volumn 33, Issue 1-3, 1996, Pages 151-155

  Aigner, Robert ^a   Dietl, Markus ^a   Katterloher, Rainer ^a   Klee, Veit ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001672066     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-4005(96)01947-8     Document Type: Article

References (5)

1. R. Aigner, F. Auerbach, P. Huber, R. Müller and G. Scheller, Sinusoidal temperature modulation of the Si-planar-pellistor, Sensors and Actuators B, 18-19 (1994) 143-147.
2. M. Gall, The Si-planar-pellistor: a low-power pellistor sensor in Si thin-film technology, Sensors and Actuators B, 4 (1991) 533-538.
3. P. Krebs and A. Grisel, A low power integrated catalytic gas sensor, Sensors and Actuators B, 13-14 (1993) 155-158.
4. C. Vauchier, D. Chariot, G. Delapierre and A. Accorsi, Thin-film gas catalytic microsensor, Sensors and Actuators B, 5 (1991) 33-36.
5. G. Niebling, R. Aigner, D. Wabner and R. Menzel, Data reduction for curve analysis, at Transducers-EurosensorsIX, Stockholm, 1995.