SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Sensors and Materials

Volumn 10, Issue 6, 1998, Pages 337-350

Monolithic three-dimensional single-crystal silicon microelectromechanical systems

(3) Hofmann, Wolfgang a Lee, Chris S a MacDonald, Noel C a

a Cornell University (United States)

Author keywords

SCREAM process; Single crystal silicon MEMS; Three dimensional silicon micromachining

Indexed keywords

EID: 0041192917 PISSN: 09144935 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (5)

References (35)

1
- 0003775660
- John Wiley and Sons Ltd., Chichester, England
- J. W. Gardner: Microsensors Principles and Applications (John Wiley and Sons Ltd., Chichester, England, 1994).
- (1994) Microsensors Principles and Applications
- Gardner, J.W.¹

2
- 0026911949
- C. Linder, L. Paratte, M.-A. Grétillat, V. P. Jaecklin and N. F. DeRooij: J. Micromech. Microeng. 2 (1992) 122.
- (1992) J. Micromech. Microeng. , vol.2 , pp. 122
- Linder, C.¹ Paratte, L.² Grétillat, M.-A.³ Jaecklin, V.P.⁴ Derooij, N.F.⁵

3
- 0024770772
- N. C. MacDonald, L. Y. Chen, J. J. Yao, Z. L. Zhang, J. A. McMillan and D. C. Thomas: Sensors and Actuators 20 (1989) 123.
- (1989) Sensors and Actuators , vol.20 , pp. 123
- MacDonald, N.C.¹ Chen, L.Y.² Yao, J.J.³ Zhang, Z.L.⁴ McMillan, J.A.⁵ Thomas, D.C.⁶

4
- 0018030427
- K. E. Bean: IEEE Trans. Electron Devices ED-25 (1978) 1185.
- (1978) IEEE Trans. Electron Devices , vol.ED-25 , pp. 1185
- Bean, K.E.¹

5
- 0017981972
- W. Kern: RCA Review 39 (1979) 278.
- (1979) RCA Review , vol.39 , pp. 278
- Kern, W.¹

6
- 0026385794
- J. S. Danel and G. Delapierre: J. Micromech. Microeng, 1 (1991) 187.
- (1991) J. Micromech. Microeng , vol.1 , pp. 187
- Danel, J.S.¹ Delapierre, G.²

7
- 0040086917
- MEMS 90
- W. Menz, W. Bacher, M. Harmening and A. Michel: 1990 Int. Workshop on Micro Electro Mechanical Systems (MEMS 90) p. 69.
- Int. Workshop on Micro Electro Mechanical Systems , pp. 69
- Menz, W.¹ Bacher, W.² Harmening, M.³ Michel, A.⁴

8
- 0040680545
- MEMS 92
- M. Herming, W. Bach, P. Bley, A. El-Kholi, H. Kalb, B Kownaz, W. Menz, A. Michel and J. Mohr: 1992 Int. Workshop on Micro Electro Mechanical Systems (MEMS 92) p. 202.
- 1992 Int. Workshop on Micro Electro Mechanical Systems , pp. 202
- Herming, M.¹ Bach, W.² Bley, P.³ El-Kholi, A.⁴ Kalb, H.⁵ Kownaz, B.⁶ Menz, W.⁷ Michel, A.⁸ Mohr, J.⁹

9
- 0029543056
- Stockholm, Sweden, June
- C. G. Keller and R. T. Howe: Transducers 95 Vol. 2 (Stockholm, Sweden, June 1995) p. 376.
- (1995) Transducers 95 , vol.2 , pp. 376
- Keller, C.G.¹ Howe, R.T.²

10
- 36149031115
- Z. L. Zhang and N. C. MacDonald: J. Micromech. Microeng. 2 (1992) 31.
- (1992) J. Micromech. Microeng. , vol.2 , pp. 31
- Zhang, Z.L.¹ MacDonald, N.C.²

11
- 0028333279
- K. A. Shaw, Z. L. Zhang and N. C. MacDonald: Sensors and Actuators A 40 (1994) 63.
- (1994) Sensors and Actuators A , vol.40 , pp. 63
- Shaw, K.A.¹ Zhang, Z.L.² MacDonald, N.C.³

12
- 0030233744
- N. C. MacDonald: Microelectronic Engineering 32 (1996) 49.
- (1996) Microelectronic Engineering , vol.32 , pp. 49
- MacDonald, N.C.¹

13
- 0038912308
- Z. L. Zhang and N. C. MacDonald: J. Vac. Sci. Technol. B 4 (6) (1993) 2538.
- (1993) J. Vac. Sci. Technol. B , vol.4 , Issue.6 , pp. 2538
- Zhang, Z.L.¹ MacDonald, N.C.²

14
- 0001009621
- Y. Xu, S. A. Miller and N. C. MacDonald: Applied Physics Lett. 67 (16) (1995) 2305.
- (1995) Applied Physics Lett , vol.67 , Issue.16 , pp. 2305
- Xu, Y.¹ Miller, S.A.² MacDonald, N.C.³

15
- 0030100650
- E. H. Klaassen, K. Peterson, J. M. Noworolski, J. Logan, N. I. Maluf, J. Brown, C. Storment, W. McCulley and G. T. A. Kovacs: Sensors and Actuators A 52 (1996) 132.
- (1996) Sensors and Actuators A , vol.52 , pp. 132
- Klaassen, E.H.¹ Peterson, K.² Noworolski, J.M.³ Logan, J.⁴ Maluf, N.I.⁵ Brown, J.⁶ Storment, C.⁷ McCulley, W.⁸ Kovacs, G.T.A.⁹

16
- 0030679958
- MEMS 97
- C. Marxer, M.-A. Grétillat, N. F. de Rooij, R. Bättig, O. Anthamatten, B. Valk and P. Vogel: 1997 Int. Workshop on Micro Electro Mechanical Systems (MEMS 97) p. 49.
- 1997 Int. Workshop on Micro Electro Mechanical Systems , pp. 49
- Marxer, C.¹ Grétillat, M.-A.² De Rooij, N.F.³ Bättig, R.⁴ Anthamatten, O.⁵ Valk, B.⁶ Vogel, P.⁷

17
- 0002662639
- South Carolina
- C. S. Lee, S. Han and N.C. MacDonald: Solid-State Sensor and Actuator Workshop (Hilton Head Island, South Carolina, 1998) p. 45.
- (1998) Solid-state Sensor and Actuator Workshop Hilton Head Island , pp. 45
- Lee, C.S.¹ Han, S.² MacDonald, N.C.³

18
- 0040086918
- W. Hofmann and N. C. MacDonald: J. Vac. Sci. Technol. B 15 (6) (1997) 2713.
- (1997) J. Vac. Sci. Technol. B , vol.15 , Issue.6 , pp. 2713
- Hofmann, W.¹ MacDonald, N.C.²

19
- 0038518735
- S. Arney and N. C. MacDonald: J. Vac. Sci. Technol. B 6 (1) (1988) 341.
- (1988) J. Vac. Sci. Technol. B , vol.6 , Issue.1 , pp. 341
- Arney, S.¹ MacDonald, N.C.²

20
- 0026837056
- J. Yao, S. Arney and N.C. MacDonald: J. of Microelectromechanical Systems 1 (1992) 14.
- (1992) J. of Microelectromechanical Systems , vol.1 , pp. 14
- Yao, J.¹ Arney, S.² MacDonald, N.C.³

21
- 0000327290
- J. P. Spallas and N. C. MacDonald: J. Vac. Sci. Technol. B 11 (2) (1993) 437.
- (1993) J. Vac. Sci. Technol. B , vol.11 , Issue.2 , pp. 437
- Spallas, J.P.¹ MacDonald, N.C.²

22
- 0000160233
- M. T. A Saif and N. C. MacDonald: Rev. Sci. Instrum. 69 (1998) 1410.
- (1998) Rev. Sci. Instrum. , vol.69 , pp. 1410
- Saif, M.T.A.¹ MacDonald, N.C.²

23
- 0020127035
- K. E. Peterson: Proc. IEEE 70 (1982) 420.
- (1982) Proc. IEEE , vol.70 , pp. 420
- Peterson, K.E.¹

24
- 0007609250
- I. Ogo and N. C. MacDonald: J. Vac. Sci. and Technol. B 12 (6) (1994) 3285.
- (1994) J. Vac. Sci. and Technol. B , vol.12 , Issue.6 , pp. 3285
- Ogo, I.¹ MacDonald, N.C.²

25
- 0029369758
- R.E. Mihailovich and N. C. MacDonald: Sensors and Actuators A 50 (1995) 199.
- (1995) Sensors and Actuators A , vol.50 , pp. 199
- Mihailovich, R.E.¹ MacDonald, N.C.²

26
- 0040086919
- MEMS 96
- K. A. Shaw, S. G. Adams, F. M. Bertsch, P. G. Hartwell and N. C. MacDonald: 1996 Int. Workshop on Micro Electro Mechanical Systems (MEMS 96).
- 1996 Int. Workshop on Micro Electro Mechanical Systems
- Shaw, K.A.¹ Adams, S.G.² Bertsch, F.M.³ Hartwell, P.G.⁴ MacDonald, N.C.⁵

27
- 0038902531
- U.S. Patent No. 5,501,893 (1996)
- F. Laermer and A. Schilp: U.S. Patent No. 5,501,893 (1996).
- Laermer, F.¹ Schilp, A.²

28
- 0029490523
- Stockholm, Sweden
- D. Haronian and N. C. MacDonald: Transducers 95 Vol. 2 (Stockholm, Sweden, 1995) p. 708.
- (1995) Transducers 95 , vol.2 , pp. 708
- Haronian, D.¹ MacDonald, N.C.²

29
- 0029534538
- Stockholm, Sweden
- R. Prasad and N. C. MacDonald: Transducers 95 Vol. 2 (Stockholm, Sweden 1995) p. 52.
- (1995) Transducers 95 , vol.2 , pp. 52
- Prasad, R.¹ MacDonald, N.C.²

30
- 0038902527
- San Francisco, CA
- R. Prasad, K. F. Böhringer, and N.C. MacDonald: 1995 International Mechanical Engineering Congress & Exposition (IMECE '95): Symposium on Micro-Mechanical Systems (San Francisco, CA, 1995).
- (1995) 1995 International Mechanical Engineering Congress & Exposition (IMECE '95): Symposium on Micro-mechanical Systems
- Prasad, R.¹ Böhringer, K.F.² MacDonald, N.C.³

31
- 0029755543
- MEMS 96
- K. F. Böhringer, B. R. Donald and N. C. MacDonald: 1996 Int. Workshop on Micro Electro Mechanical Systems (MEMS 96) p. 7.
- 1996 Int. Workshop on Micro Electro Mechanical Systems , pp. 7
- Böhringer, K.F.¹ Donald, B.R.² MacDonald, N.C.³

32
- 0032027736
- S. G. Adams, F. M. Bertsch, K. A. Shaw, P. G. Hartwell, F. C. Moon and N. C. MacDonald: J. Micromech. Microeng. 8 (1998) 15.
- (1998) J. Micromech. Microeng. , vol.8 , pp. 15
- Adams, S.G.¹ Bertsch, F.M.² Shaw, K.A.³ Hartwell, P.G.⁴ Moon, F.C.⁵ MacDonald, N.C.⁶

33
- 0032099254
- S. G. Adams, F. Bertsch, K. A. Shaw and N. C. MacDonald: J. of Microelectromechanical Systems 7 (1998) 172.
- (1998) J. of Microelectromechanical Systems , vol.7 , pp. 172
- Adams, S.G.¹ Bertsch, F.² Shaw, K.A.³ MacDonald, N.C.⁴

34
- 0040680541
- Taejon, Korea
- A. A. Ayon, N. J. Kolias and N. C. MacDonald: Asia-Pacific Microwave Conference (Taejon, Korea 1995).
- (1995) Asia-Pacific Microwave Conference
- Ayon, A.A.¹ Kolias, N.J.² MacDonald, N.C.³

35
- 0038902530
- MEMS 96
- X. T. Huang and N. C. MacDonald: 1996 Int. Workshop on Micro Electro Mechanical Systems (MEMS 96) p. 424.
- 1996 Int. Workshop on Micro Electro Mechanical Systems , pp. 424
- Huang, X.T.¹ MacDonald, N.C.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.