IR Imaging

Comprehensive Microsystems

Volumn 3, Issue , 2007, Pages 113-163

  Kimata, Masafumi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Dielectric bolometer; Diode bolometer; Focal plane array; Infrared; Pyroelectric; Resistance bolometer; Thermal; Thermoelectric; Uncooled

Indexed keywords

EID: 84899900525     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-044452190-3.00030-6     Document Type: Chapter

References (126)

1. Almasri M., Butler D.P., Celik-Butler Z. Semiconducting YBCO bolometers for uncooled IR detection. Proc. SPIE 2000, 4028:17-26.
2. Altman M., Backer B., Kohin M., Blackwell R., Butler N., Cullen J. Lockheed Martin's 640×480 uncooled microbolometer camera. Proc. SPIE 1999, 3698:137-143.
3. Amantea R., Knoedler C.M., Pantuso F.P., Patel V.K., Sauer D.J., Tower J.R. An uncooled IR imager with 5mK NETD. Proc. SPIE 1997, 3061:210-222.
4. Amantea R., Goodman L.A., Pantuso F., Sauer D.J., Varghese M., Villani T.S., White L.K. Progress towards an uncooled IR imager with 5 mK NETD. Proc. SPIE 1998, 3436:647-659.
5. Asahi R., Tabata O., Suzuki F., Sugiyama S., Suzuki M., Tanaka A. An infrared imaging sensor using poly-silicon p-n junction diodes. Tech. Dig. 11th Sensor Symposium Tokyo, Japan 1992, 99-102.
6. Astier A., Arnaud A., Ouvrier-Buffet J.-L., Yon J.-J., Motin E. Advanced packaging developed for very low cost uncooled IRFPA. Proc. SPIE 2004, 5406:412-421.
7. Belcher J.F., Hanson C.M., Beratan H.R., Udayakumar K.R., Soch K.L. Uncooled monolithic ferroelectric IRFPA technology. Proc. SPIE 1998, 3436:611-622.
8. Beratan H., Hanson C., Meissner E.G. Low-cost uncooled ferroelectric detector. Proc. SPIE 1994, 2274:147-156.
9. Boyle W.S., Smith G.E. Charge-coupled semiconductor devices. Bell Syst. Tech. J. 1970, 49:587-593.
10. Brady J., Schimert T., Ratcliff D., Gooch R., Ritchey B., McCardel P., Rachels K., Ropson S., Wand M., Weinstein W., Wynn J. Advances in amorphous silicon uncooled IR systems. Proc. SPIE 1999, 3698:161-167.
11. Capper P., Elliott C.T. Infrared Detectors and Emitters: Materials and Devices 2001, Kluwer Academic Publishers, Norwell, MA.
12. Celik-Butler Z., Butler D.P., Yildiz A. Room-temperature YBaCuO infrared detectors on a flexible substrate. Proc. SPIE 2002, 4721:260-268.
13. Choi I.H., Wise K.D. A silicon-thermopile-based infrared sensing array for use in automated manufacturing. IEEE Trans. Electron Devices 1986, ED-32:72-79.
14. Cole B.E., Higashi R.E., Ridely J.A., Wood R.A. Integrated vacuum packaging for low-cost light-weight uncooled microbolometer arrays. Proc. SPIE 2001, 4369:235-239.
15. Datskos P.G., Rajic S., Senesac L.R., Earl D.D., Evans B.M., Corbeil J.L., Datskou I. Optical readout of uncooled thermal detectors. Proc. SPIE 2000, 4230:185-197.
16. Dehe A., Fricke K., Hartnagel H.L. Infrared thermopile sensor based on AlGaAs-GaAs micromachining. Sens. Actuators A 1995, 46-47:432-436.
17. Dehe A., Pavlidis D., Hong K., Hartnagel H.L. InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology. IEEE Trans. Electron Devices 1997, 44:1052-1059.
18. Dereniak E.L., Crowe D.G. Optical Radiation Detectors 1984, John Wiley and Sons, New York.
19. Eminoglu S., Tezcan D.S., Akin T. A CMOS n-well microbolometer FPA with temperature coefficient enhancement circuitry. Proc. SPIE 2001, 4369:240-249.
20. Eminoglu S., Tanrikulu M.Y., Tezcan D.S., Akin T. A low-cost small pixel uncooled infrared detector for large focal plane arrays using a standard CMOS process. Proc. SPIE 2002, 4721:111-121.
21. Eminoglu S., Tanrikulu M.Y., Akin T. Low-cost uncooled infrared detector arrays in standard CMOS. Proc. SPIE 2003, 5074:425-436.
22. Flusberg A., Deliwala S. Highly sensitive infrared imager with direct optical readout. Proc. SPIE 2006, 6206. 62061E1-E18, Orlanda, FL, USA.
23. Foote M.C., Gaalema S. Progress towards high-performance thermopile imaging arrays. Proc. SPIE 2001, 4369:350-355.
24. Foote M.C., Jones E.W. High performance micromachined thermopile linear arrays. Proc. SPIE 1998, 3379:192-197.
25. 1/2/W. IEEE Trans. Electron Devices 1998, 45:1896-1902.
26. Francisco G.L. Amorphous silicon bolometer for fire/rescue. Proc. SPIE 2001, 4360:138-148.
27. Fujitsuka N., Sakata J., Miyachi Y., Mizuno K., Ohtsuka K., Taga Y., Tabata O. Monolithic pyroelectric infrared image sensor using PVDF thin film. Proc. Int. Conf. Solid-State Sensors and Actuators (Transducers) 1997, 1237-1240.
28. Han C.J., Rawlings R., Sweeney M., Whicker S., Peysha D., Clarke J.E., Sullivan B., Li C., Howard P. 320×240 and 640×480 UFPAs for TWS and DVE applications. Proc. SPIE 2005, 5783:559-565.
29. Hanson C. Uncooled thermal imaging at Texas Instruments. Proc. SPIE 1993, 2020:330-339.
30. Hanson C.M., Beratan H.R. Thin-film ferroelectrics: Breakthrough. Proc. SPIE 2002, 4721:91-99.
31. Hanson C., Beratan H., Owen R. Uncooled thermal imaging at Texas Instruments. Proc. SPIE 1992, 1735:17-26.
32. Hanson C.M., Beratan H.R., Belcher J.F. Uncooled infrared imaging using thin-film ferroelectrics. Proc. SPIE 2001, 4288:298-303.
33. Hay K.A., Deusen D.V. Uncooled focal plane array detector development at Infrared Vision Technology Corporation. Proc. SPIE 2005, 5783:514-523.
34. Henini M., Razeghi M. Handbook of Infrared Detection Technologies 2002, Elsevier Science Ltd, Oxford.
35. Herring R., Howard P.E. Design and performance of the ULTRA 320×240 uncooled focal plane array and sensor. Proc. SPIE 1996, 2746:2-12.
36. Hirota M., Morita S. Infrared sensor with precisely patterned Au-black absorption layer. Proc. SPIE 1998, 3436:623-635.
37. Hirota M., Satou F., Saito M., Kishi Y., Nakajima Y., Uchiyama M. Thermoelectric infrared imager and automotive applications. Proc. SPIE 2001, 4369:312-321.
38. Hirota M., Nakajima Y., Saito M., Satou F., Uchiyama M. 120×90 element thermopile array fabricated with CMOS technology. Proc. SPIE 2003, 4820:239-429.
39. x microbolometer uncooled IR focal plane. Proc. SPIE 1999, 3698:131-137.
40. Hudson R.D. Infrared System Engineering 1969, John Wiley and Sons, New York.
41. Hunter S.R., Amante R.A., Goodman L.A., Kharas D.B., Gershtein S., Matey J.R., Perna S.N., Yu Y., Maley N., White L.K. High sensitivity uncooled microcantilever infrared imaging arrays. Proc. SPIE 2003, 5074:469-480.
42. Hunter S.R., Mauer G.S., Simelgor G., Jiang L. High-sensitivity uncooled microcantilever infrared imaging arrays. Proc. SPIE 2006, 6206. 62061J-1-1-12, Orlando, FL, USA.
43. Ishikawa T., Ueno M., Endo K., Nakaki Y., Hata H., Sone T., Kimata M., Ozeki T. Low-cost 320×240 uncooled IRFPA using conventional silicon IC process. Proc. SPIE 1999, 3698:556-564.
44. Ishikawa T., Ueno M., Nakaki Y., Endo K., Ohta Y., Nakanishi J., Kosasayama Y., Yagi H., Sone T., Kimata M. Performance of 320×240 uncooled IRFPA with SOI diode detectors. Proc. SPIE 2000, 4130:152-159.
45. Ishizuya T., Suzuki J., Akagawa K., Kazama T. Optically readable bi-materials infrared detector. Proc. SPIE 2001, 4369:342-349.
46. Jahanzeb A., Traverse C.M., Celik-Butler Z., Butler D.P., Tan S.G. A semiconductor YBaCuO microbolometer for room temperature IR imaging. IEEE Trans. Electron Devices 1997, 44:1795-1801.
47. Jerominek H., Pope T.D., Alain C., Zhang R., Lehoux M., Picard F., Fuchs R.W., Grenier C., Rouleau Y., Cayer F., Savard S., Bilodeau G., Couillard J.-F., Larouche C., Phong L.N. 128×128 pixel uncooled bolometric FPA for IR detection and imaging. Proc. SPIE 1998, 3436:585-592.
48. 2-based bolometric detectors for high-performance uncooled FPAs. Proc. SPIE 2000, 4028:47-56.
49. Kanno T., Saga M., Matsumoto S., Uchida M., Tsukamoto N., Tanaka A., Itoh S., Nakazato A., Endoh T., Tohyama S., Yamamoto Y., Murashima S., Fujimoto N., Teranishi N. Uncooled infrared focal plane array having 128×128 thermopile detector elements. Proc. SPIE 1994, 2269:450-459.
50. Kimata M., Denda M., Yutani N., Iwade S., Tsubouchi N. A 512×512 element PtSi Schottky-barrier infrared image sensor. IEEE JSSC 1987, SC-22:1124-1129.
51. Kimata M., Ueno M., Takeda M., Seto T. SOI diode uncooled infrared focal plane arrays. Proc. SPIE 2006, 6127:61270X-1. 61270X-11.
52. Kosasayama Y., Sugino T., Nakaki Y., Fujii Y., Inoue H., Yagi H., Hata H., Ueno M., Takeda M., Kimata M. Pixel scaling for SOI diode uncooled infrared focal plane arrays. Proc. SPIE 2004, 5406:504-511.
53. Kruse P.W. Uncooled IR focal plane array. Proc. SPIE 1995, 2552:556-563.
54. Kruse P.W. Uncooled Thermal Imaging Arrays, Systems and Applications 2001, SPIE, Bellingham, MA.
55. Kruse P.W., Skatrud D.D. Uncooled Infrared Imaging Arrays and Systems 1997, Academic Press, San Diego, CA.
56. Kruse P.W., McGlauchlin L.D., McQuistan R.B. Elements of Infrared Technology: Generation, Transmission, and Detection 1962, John Wiley and Sons, New York.
57. Lahiji G.R., Wise K.D. A batch-fabricated silicon thermopile infrared detector. IEEE Trans. Electron. Devices 1982, ED-29:14-22.
58. Lawson W.D., Nielson S., Putley E.H., Young A.S. Preparation and properties of HgTe and mixed crystals of HgTe-CdTe. J. Phys. Chem. Solids 1959, 9:325-329.
59. Lee H.-K., Yoon J.-B., Yoon E., Ju S.-B., Yong Y.-J., Lee W., Kim S.-G. A high fill-factor IR bolometer using multi-level electrothermal structures. Tech. Dig. IEEE Int. Electron Device Meeting, San Francisco, CA, USA 1998, 436-466.
60. Lenggenhanger R., Baltes H., Peer J., Forster M. Thermoelectric infrared sensors by CMOS technology. IEEE Electron. Device Lett. 1992, 13:454-456.
61. Lenggenhager R., Baltes H., Elbel T. Thermoelectric infrared sensors in CMOS technology. Sens. Actuators A 1993, 37-38:216-220.
62. Leonov V.N., Greten Y., Moor P.D., Bois B.D., Goessens C., Grietens B., Merken P., Perova N.A., Puttens G., Hoof C.V., Verbist A., Veermeiren J. Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs. Proc. SPIE 2003, 5074:446-457.
63. Liddiard K.C. Thin-film resistance bolometer IR detectors. Infrared Phys. 1983, 24:57-64.
64. Liddiard K.C. Application of interferrometric enhancement to self-absorbing thin film thermal IR detectors. Infrared Phys. 1993, 34:379-384.
65. Lim H.C., Tsao S., Taguchi M., Zhang W., Quivy A.A., Razeghi M. InGaAs/InGaP quantum-dot infrared photodetectors with a high detectivity. Proc. SPIE 2006, 6127:61270N-1. 61270N-6.
66. Manning P.A., Gillham J.P., Parkinson N.J., Kaushal T.P. Silicon foundry micro-bolometers - The route to the mass-market thermal imager. Proc. SPIE 2004, 5406:465-472.
67. Marshall C., Butler N., Blackwell R., Murphy R., Breen T. Uncooled infrared sensor with digital focal plane array. Proc. SPIE 1996, 2746:23-31.
68. McEwen R.K., Manning P.A. European uncooled thermal imaging sensors. Proc. SPIE 1999, 3698:322-337.
69. Mizrahi U., Fraenkel A., Bykov L., Giladi A., Adin A., Ilan E., Shiloah N., Malkinson E., Zabar Y., Seter D., Nakash R., Kopolovich Z. Uncooled detector development program at SCD. Proc. SPIE 2005, 5783:551-558.
70. Moor D.P., John J., Sedky S., Hoof C.V. Linear arrays of fast uncooled poly SiGe microbolometers for IR detection. Proc. SPIE 2000, 4028:27-34.
71. Mottin E., Martin J.-L., Ouvrrier-buffet J.-L., Vilain M., Bain A., Yon J.-J., Tissot J.-L., Chatard J.-P. Enhanced amorphous silicon technology for 320×240 microbolometer arrays with a pitch of 35μm. Proc. SPIE 2001, 4369:250-256.
72. Mottin E., Bain A., Martin J.L., Ouvrier-Buffet J.L., Yon J.J., Chatard J.P., Tissot J.L. Uncooled amorphous silicon technology: High performance achievement and feature trends. Proc. SPIE 2002, 4721:56-63.
73. Münch U., Jaeggi D., Schneeberger K., Schaufelberbühl O., Paul, Baltes H., Jasper J. Industrial fabrication technology for CMOS infrared sensor arrays. Proc. Transducers '97 1997, 205-208.
74. Murguia J.E., Tedrow P.K., Shepherd F.D., Leahy D., Weeks M.M. Performance analysis of a thermoionic thermal detector at 400K, 300K, and 200K. Proc. SPIE 1999, 3698:361-375.
75. Murphy D., Ray M., Wyles R., Asbrock J., Lum N., Wyles J., Hewitt C., Kennedy A., Lue D.V., Anderson J., Bradley D., Chin R., Kostzewa T. High sensitivity 25μm microbolometer FPAs. Proc. SPIE 2002, 4721:99-110.
76. x microbolometer FPAs. Proc. SPIE 2003, 5074:402-413.
77. x microbolometer FPAs. Proc. SPIE 2005, 5783:448-459.
78. Murphy D., Ray M., Kennedy A., Wyles J., Hewitt C., Gordon E., Sessler T., Baur S., Lue D.V., Anderson S., Chin R., Gonzalez H., Pere C.L., Ton S. High sensitivity 640×512 (20μm pitch) microbolometer FPAs. Proc. SPIE 2006, 6206. 62061A-1-1-14.
79. Nakaki Y., Hata H., Yagi H., Inoue H., Sugino T., Ueno M., Takeda M., Kimata M. Dry micromachining process for uncooled IR FPA with SOI diode detectors. SENSOR 2003 Proc. 2003, 179-184.
80. Noble P.J.W. Self-scanned silicon image detector arrays. IEEE Trans. Electron Devices 1968, ED-15:202-209.
81. Norton P.W., Kohin M. Technology and applications advancements of uncooled imagers. Proc. SPIE 2005, 5783:524-530.
82. Norton P.W., Cox S., Murphy B., Grealish K., Joswick M., Denley B., Feda F., Elmali L., Kohin M. Uncooled thermal imaging sensor and application advances. To be Published in Proc. SPIE 2006, 6206. 620617-1-7.
83. Oden P.I., Wachter E.A., Datskos P.G., Thundat T., Warmack R.J. Optical and infrared detection using microcantilevers. Proc. SPIE 1996, 2744:345-354.
84. Oliver A.D., Wise K.D. A 1024-element bulk-micromachined thermopile infrared imaging array. Sens. Actuators 1999, 73:222-231.
85. Owen R., Frank S., Daz C. Producibility of uncooled IRFPA detectors. Proc. SPIE 1992, 1683:74-80.
86. Radford W., Murphy D., Ray M., Propst S., Kennedy A., Kojiro J., Woolaway J., Soch K., Coda R., Lung G., Moody E., Gleichman D., Baur S. 320×240 silicon microbolometer uncooled IRFPAs with on-chip offset correction. Proc. SPIE 1996, 2746:82-92.
87. Radford W., Murphy D., Finch A., Hay K., Kennedy A., Ray M., Sayed A., Wyles J., Varesi J., Moody E., Cheung F. Sensitivity improvements in uncooled microbolometer FPAs. Proc. SPIE 1999, 3698:119-130.
88. Rai-Choudhury P. MEMS and MOEMS Technology and Applications 2000, SPIE, Bellingham, MA, USA.
89. y thin films for uncooled microbolometers. Proc. SPIE 2005, 5783:597-606.
90. Reay R., Klaassen E.H., Kovacs G.T.A. Thermally and electrically isolated single crystal silicon structures in CMOS technology. IEEE Electron Device Lett. 1994, 15:399-401.
91. Rogalski A. Infrared Photon Detectors 1995, SPIE, Bellingham, MA, USA.
92. Schaufelbüehl A., Münch U., Menolfi C., Brand O., Paul O., Huang Q., Baltes H. 256-pixel CMOS-integrated thermoelectric infrared sensor array. Proc. 14th IEEE Int. Conf. Micro Electro Mechanical Systems 2001, 200-203.
93. Schaufelbühl A., Scheeberger N., Münch U., Waelti M., Paul O., Brand O., Baltes H., Menolfi C., Huang Q., Doering E., Loepfe M. Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array. IEEE J. MEMS 2001, 10:503-510.
94. Schneeberger N., Paul O., Baltes H. Optimization structured absorbers for CMOS infrared detectors. Proc. Transducers '95 and Eurosensors IX 1995, 25-29.
95. Secundo L., Lubianiker Y., Agranat A.J. Uncooled FPA with optical reading: Reaching the theoretical limit. Proc. SPIE 2005, 5783:483-495.
96. Sedky S., Fiorini P., Caymax M., Baert C., Hermans L., Mertens R. Characterization of bolometers based on polycrystalline silicon germanium alloys. IEEE Eelctron Device Lett. 1998, 19:376-378.
97. Suzuki M., Makino K., Tanaka A., Asahi R., Tabata O., Sugiyama S., Takigawa M. An infrared detector using poly-silicon p-n junction diode. Tech. Dig. 9th Sensor Symposium 1990, 71-74.
98. Sze S.M. Physics of Semiconductor Devices 1969, John Wiley and Sons, New York.
99. Tanaka A., Suzuki M., Asahi R., Tabata O., Sugiyama S. Infrared linear image sensor using a poly-Si pn junction diode array. Infrared Phys. 1992, 33:229-236.
100. Tanaka A., Natsumoto S., Tsukamoto B., Itoh S., Chiba K., Endoh T., Nakazato A., Okuyama K., Kumazawa Y., Hijikawa M., Gotoh H., Tanaka T., Teranishi N. Infrared focal plane array incorporating silicon IC process compatible bolometer. IEEE Trans. Electron Devices 1996, 43:1844-1850.
101. Terre B., Cannata B., Franklin P., Gonzalez A., Kurth E., Ly H., Parrish B., Peters K., Romeo T., VanYsseldyk B. Microbolometer development and production at Indigo Systems. Proc. SPIE 2003, 5074:518-526.
102. Tezcan D.S., Eminoglu S., Akae O.S., Akin T. An uncooled microbolometer infrared focal plane array in standard CMOS. Proc. SPIE 2001, 4288:112-121.
103. Tissot J.-L., Rothan F., Vedel C., Vilain M., Yon J.-J. LETI/LIR's amorphous silicon uncooled microbolometer development. Proc. SPIE 1998, 3379:139-144.
104. Tissot J.-L., Martin J.-J., Mottin E., Viain M., Yon J.-J., Chatard J.P. 320×240 microbolometer uncooled IRFPA development. Proc. SPIE 2000, 4130:473-479.
105. Tissot J.-L., Crastes A., Trouilleau C., Fieque B., Tinnes S. Multipurpose high performance 160×120 uncooled IRFPA. Proc. SPIE 2004, 5406:550-556.
106. Tissot J.-L., Fieque B., Trouilleau C., Robert R., Crasters A., Minssian C., Legras O. First demonstration of 640×480 uncooled amorphous silicon IRFPA with 25μm pixel-pitch. Proc. SPIE 2006, 6206. 620618-1-4.
107. Todd M.A., Manning P.A., Donohue P.P., Brown A.G., Watton R. Thin film ferroelectric materials for microbolometer arrays. Proc. SPIE 2000, 4130:128-139.
108. Tohyama S., Miyoshi M., Kurashina S., Ito N., Sasaki T., Ajisawa A., Oda N. New thermal isolation pixel structure for high-resolution uncooled infrared FPAs. Proc. SPIE 2004, 5406:428-436.
109. Ueno M., Kosasayama Y., Sugino T., Nakaki Y., Fujii Y., Inoue H., Kama K., Seto T., Takeda M., Kimata M. 640×480 pixel uncooled infrared FPA with SOI diode detectors. Proc. SPIE 2005, 5783:567-577.
110. Unewisse M.H., Craig B.I., Watson R.J., Reinholed O., Liddiard K.C. The growth and properties of semiconductor bolometers for infrared detection. Proc. SPIE 1995, 2554:43-54.
111. Vedel C., Martin J.-L., Ouvrier-Buffet J.L., Tissot J.-L., Vilain M., Yon J.-J. Amorphous silicon based uncooled microbolometer IRFPA. Proc SPIE 1999, 3698:276-283.
112. Wada H., Nagashima M., Oda N., Sasaki T., Kawahara A., Kanzaki M., Tsuruta Y., Mori T., Matsumoto S., Sima T., Hijikawa M., Tsukamoto N., Gotoh H. Design and performance of 256×256 bolometer-type uncooled infrared detector. Proc. SPIE 1998, 3379:90-100.
113. Wada H., Sone T., Hata H., Nakaki Y., Kaneda O., Ohta Y., Ueno M., Kimata M. YBaCuO uncooled microbolometer IRFPA. Sens. Mater. 2000, 12:315-325.
114. Wang W., Ypadhyay V., Munoz C., Bumgarner J., Edwards O. FEA simulation, design and fabrication of uncooled MEMS capacitive thermal detector for infrared FPA imaging. Proc. SPIE 2006, 6206. 62061L-1-12.
115. Watton R., Manning P. Ferroelectrics in uncooled thermal imaging. Proc. SPIE 1998, 3436:541-554.
116. Watton R., Manning P.A., Perkins M.J.C., Gillham J.P., Todd M.A. Uncooled IR imaging: Hybrid and integrated bolometer arrays. Proc. SPIE 1996, 2744:486-499.
117. Wood R.A. High-performance infrared thermal imaging with monolithic silicon focal planes operating at room temperature. Proc. IEEE IEDM 1993, 175-177.
118. Wood R.A. Uncooled thermal imaging with monolithic silicon focal planes. Proc. SPIE 1993, 2020:322-329.
119. Wood R.A., Han C.J., Kruse P.W. Integrated uncooled infrared detector imaging array. Tech. Dig. IEEE Solid-State Sensor and Actuator Workshop 1992, 132-135.
120. Wu M., Cook J., Vito R.D., Li J., Ma E., Murano R., Nemchuk N., Tabasky M., Wagner M. Novel low-cost uncooled infrared camera. Proc. SPIE 2005, 5783:496-505.
121. Xu Y.-P., Huang R.-S., Rigby A. A silicon-diode-based infrared thermal detector array. Sens. Actuators A 1993, 37-38:226-230.
122. Xu H., Mukaigawa T., Hashimoto K., Kubo R., Kiyomoto T., Zhu H., Noda M., Okuyama M. Si monolithic microbolometers of ferroelectric BST thin film combined with readout FET for uncooled infrared image sensor. Tech Dig. 10th Int. Conf. Solid-State Sensors and Actuators (Transducers) 1999, 398-401.
123. 3 thin-film ferroelectric microbolometers for uncooled chopperless infrared sensing. Proc. SPIE 2000, 4130:140-151.
124. Yon J.J., Astier A., Bisotto S., Chamings G., Durand A., Martin J.L., Mottin E., Ouvrier-Buffet J.L., Tissot J.L. First demonstration of 25 μm pitch uncooled amorphous silicon microbolometer IRFPA at LETI-LIR. Proc. SPIE 2005, 5783:432-440.
125. Yutani N., Yagi H., Kimata M., Nakanishi J., Nagayoshi S., Tsubouchi N. 1040×1040 element PtSi Schottky-barrier IR image sensor. Tech. Digest IEDM 1991, 175-178.
126. Zhao Y., Choi J., Horowtz R., Majumdar A., Kitching J., Norton P. Characterization and performance of optomechanical uncooled infrared imaging system. Proc SPIE 2003, 4820:164-174.