SOI diode uncooled infrared focal plane arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6127, Issue , 2006, Pages

  Kimata, Masafumi ^a   Ueno, Masashi ^b   Takeda, Munehisa ^b   Seto, Toshiki ^b  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Diode; Infrared focal plane array; MEMS; SOI; Uncooled

Indexed keywords

DIODES; ETCHING; INFRARED DETECTORS; SILICON; SINGLE CRYSTALS; THERMAL CONDUCTIVITY; THIN FILMS;

INFRARED ABSORPTION; SILICON ETCHING; SOI; TEMPERATURE SENSORS; UNCOOLED INFRARED FOCAL PLANE ARRAY;

MICROELECTROMECHANICAL DEVICES;

EID: 33646732217     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.640339     Document Type: Conference Paper

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