640 × 480 pixel uncooled infrared FPA with SOI diode detectors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5783, Issue PART II, 2005, Pages 566-577

  Ueno, Masashi ^a   Kosasayama, Yasuhiro ^a   Sugino, Takaki ^a   Nakaki, Yoshiyuki ^a   Fujii, Yoshio ^a   Inoue, Hiromoto ^a   Kama, Keisuke ^a   Seto, Toshiki ^a   Takeda, Munehisa ^a   Kimata, Masafumi ^b  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Diode; Focal plane array; Infrared; SOI; Uncooled

Indexed keywords

ABSORPTION; CRYSTAL STRUCTURE; INFRARED IMAGING; SEMICONDUCTOR DIODES; SEMICONDUCTOR JUNCTIONS; SENSORS; SINGLE CRYSTALS; TEMPERATURE DISTRIBUTION;

DIODE; FOCAL PLANE ARRAY; SOI; UNCOOLED;

SILICON ON INSULATOR TECHNOLOGY;

EID: 26444580207     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.609665     Document Type: Conference Paper

References (5)

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2. T. Ishikawa, M. Ueno, Y. Nakaki, K. Endo, Y. Ohta, J. Nakanishi, Y. Kosasayama, H. Yagi, T. Sone, and M. Kimata, "Performance of 320 × 240 Uncooled IRFPA with SOI Diode Detectors," Proc. SPIE, Vol. 4130, pp. 152 -159, 2000.
3. Y. Kosasayama, T. Sugino, Y.Ohta, H. Yagi, M. Ueno, H. Inoue, Y. Nakaki, H. Hata, M. Takeda, and M. Kimata, "Pixel Scaling for SOI Diode Uncooled Infrared Focal Plane Arrays," Proc. SPIE, Vol. 5406, pp. 504-511, 2004.
4. Y. Nakaki, H. Hata, H. Yagi, H. Inoue, T. Sugino, M. Ueno, M. Takeda, and M. Kimata, "Dry Micromachining Process for Uncooled IR FPA with SOI Diode Detectors," Proc. SENSOR 2003, pp. 179- 184, 2003.
5. T. Ishikawa, M. Ueno, M. Kimata, T. Seto, and N. Tsubouchi, "Spectral Responsivity Measurement of Uncooled IRFPA using Free Electron Laser," Proc. SPIE, Vol. 4820, pp. 254-260, 2002.