Optical and infrared detection using microcantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2744, Issue , 1996, Pages 345-354

  Oden, Patrick I ^a   Wachter, Eric A ^a   Datskos, P G ^a   Thundat, Thomas G ^a   Warmack, R J ^a  

^a UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS; COMPOSITE MICROMECHANICS; OPTICAL SENSORS; PHOTODETECTORS; SPURIOUS SIGNAL NOISE; STRESSES; TEMPERATURE DISTRIBUTION;

MICROCANTILEVERS; NOISE EQUIVALENT TEMPERATURE DIFFERENCE;

INFRARED DETECTORS;

EID: 0029749741     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.243523     Document Type: Conference Paper

References (25)