Industrial fabrication technology for CMOS infrared sensor arrays

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 205-208

  Munch, U ^a   Jaeggi, D ^a   Schneeberger, K ^a   Schaufelbuhl, A ^a   Paul, O ^a   Baltes, H ^a   Jasper, J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; PASSIVATION; THERMAL INSULATION;

INFRARED SENSOR ARRAYS;

INFRARED DETECTORS;

EID: 0030658401     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)