High performance micromachined thermopile linear arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3379, Issue , 1998, Pages 192-197

  Foote, Marc C ^a   Jones, Eric W ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BATTERIES; FOCUSING; INFRARED DETECTORS; MEMBRANES; MODULATION; NITRIDES; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; TELLURIUM COMPOUNDS; TERNARY SYSTEMS; THERMOELECTRICITY; THERMOPILES;

BI SB TE; DETECTOR ARRAY (DA); DEVICE GEOMETRIES; HIGH PERFORMANCE; MICROMACHINED SILICON; MODULATION FREQUENCIES; RESPONSE TIMES; RESPONSIVITY;

DETECTORS;

EID: 0012281434     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.317587     Document Type: Conference Paper

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