Linear arrays of fast uncooled poly SiGe microbolometers for IR detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4028, Issue , 2000, Pages 27-34

  De Moor, Piet ^a   John, Joachim ^a   Sedky, Sherif ^a   Van Hoof, Chris ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; BOLOMETERS; ELECTRONICS PACKAGING; INFRARED IMAGING; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SILICON COMPOUNDS;

HERMETIC PACKAGING; MICROBOLOMETERS;

INFRARED DETECTORS;

EID: 0033720836     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)