High sensitivity 25 μm microbolometer FPAs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4721, Issue , 2002, Pages 99-110

  Murphy, D ^a   Ray, M ^a   Wyles, R ^a   Asbrock, J ^a   Lum, N ^a   Wyles, J ^a   Hewitt, C ^a   Kennedy, A ^a   Van Lue, D ^a   Anderson, J ^a   Bradley, D ^a   Chin, R ^a   Kostrzewa, T ^a  

^a RAYTHEON COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; IMAGE QUALITY; IMAGE SENSORS; INFRARED DETECTORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

FOCAL PLANE ARRAYS; MICROBOLOMETER; MICROBOLOMETER DETECTORS; OPTICAL FILL FACTOR; PIXELS; THERMAL ISOLATION; THERMAL TIME CONSTANT;

IMAGING SYSTEMS;

EID: 0036911894     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478857     Document Type: Conference Paper

References (13)

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6. W. Radford, R. Wyles, J. Wyles, J. Varesi, M. Ray, D. Murphy, A. Kennedy, A. Finch, E. Moody, F. Cheung, R. Coda, and S. Baur, "Microbolometer Uncooled Infrared Camera with 20 mK NETD," Proceedings of SPIE, Vol. 3436, pp. 636-646, July 1998.
7. W. Radford, A. Finch, K. Hay, A Kennedy, D. Murphy, M. Ray, J. Wyles, J. Varesi, E. Moody, and F. Cheung, "Sensitivity Improvements in Uncooled Microbolometer FPAs," Proceedings of IRIS Passive Sensors Specialty Group, Monterey, CA. February 1999.
8. D. Murphy, W. Radford, M. Ray, S. Propst, A Kennedy, J. Kojiro, J. Woolaway, K. Soch, R. Coda, G. Lung, E Moody, D. Gleichman, and S. Baur, "320 × 240 Silicon Microbolometer Uncooled IRFPAs with On-chip Offset Correction," Proceedings of SPIE, Vol. 2746, pp. 82-92, April 1996.
9. D. Murphy, W. Radford, J. Finch, A. Kennedy, J. Wyles, M. Ray, G. Hua, C. Peterson, S. Silverman, C. Laufer and M. Pavlov, "Multi-spectral Uncooled Microbolometer Sensor for the Mars 2001 Orbiter THEMIS Instrument," Proceedings of the 2000 IEEE Aerospace Conference, Big Sky, Montana March 2000
10. W. Radford, D. Murphy, R. Wyles, J. Wyles, J. Varesi, M. Ray, A. Kennedy, A. Finch, E. Moody, F. Cheung, T.Kostrzewa "High Sensitivity 320 × 240 (25 μm Pitch) Microbolometer FPAs," Proceedings of National Military Sensing Symposium (MSS), Charleston, SC. November 1999
11. D. Murphy, W. Radford, R. Wyles, J. Wyles, M. Ray, A. Kennedy, J.Anderson, R.Chin, D. Bradley, T.Kostrzewa, "High Sensitivity 320 × 240 (25 μm Pitch) Microbolometer FPAs and Applications Development," Proceedings of International Military Sensing Symposium (MSS), Palaiseau, France. September 2000
12. D. Murphy, R. Wyles, J. Wyles, M. Ray, A. Radford, J. Asbrock, N. Lum, C. Hewitt, G. Graham, J.Anderson, R. Chin, D. Bradley, T.Kostrzewa, "High Sensitivity (25 μm Pitch) Microbolometer FPAs", Proceedings of Military Sensing Symposium (MSS), Tysons Corner, VA. March 2001
13. D. Murphy, M. Ray, R. Wyles, J. Wyles, A. Kennedy, J. Asbrock, N. Lum, C. Hewitt, G. Graham, J.Anderson, R. Chin, D. Bradley, T.Kostrzewa, "High Sensitivity (25 μm Pitch) Microbolometer FPAs", Proceedings of the National Military Sensing Symposium (MSS), Gaithersburg, MD. November 2001