LETI/LIR's amorphous silicon uncooled microbolometer development

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3379, Issue , 1998, Pages 139-144

  Tissot, Jean Luc ^a   Rothan, Frédéric ^a   Vedel, Corrinne ^a   Vilain, Michel ^a   Yon, Jean Jacques ^a  

^a CEA LETI   (France)

Author keywords

Amorphous silicon; Infrared detector; Microbolometer; Uncooled

Indexed keywords

BOLOMETERS; DETECTORS; FOCUSING; INFRARED DETECTORS; NONMETALS; TECHNOLOGICAL FORECASTING; TEMPERATURE SENSORS; THERMAL INSULATION; THICKNESS MEASUREMENT;

DETECTOR PARAMETERS; HIGH THERMAL; INFRARED DETECTOR; LABORATORY MODELING; LOW COSTS; MICROBOLOMETER; SILICON TECHNOLOGIES; UNCOOLED;

AMORPHOUS SILICON;

EID: 0001752761     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.317580     Document Type: Conference Paper

References (4)

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2. "Ferroelectric Materials for Uncooled Thermal Imaging", R.W. Whatmore et al., SPIE Vol. 2020, p. 391-390, (1993)
3. "Uncooled Thermal Imaging with Monolithic Silicon Focal Planes", R.A. Wood, SPIE Vol. 2020, p. 322-329, (1993)
4. "Influence of Bias Heating on Titanium Bolometer Infrared Sensor", A. Tanaka et al., SPIE Vol. 3061, (1997)