Novel low-cost uncooled infrared camera

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5783, Issue PART II, 2005, Pages 496-505

  Wu, Ming ^a   Cook, Julie ^a   Devito, Rich ^a   Li, Jun ^a   Ma, Eugene ^a   Murano, Rob ^a   Nemchuk, Nikolay ^a   Tabasky, Marvin ^a   Wagner, Matthias ^a  

^a Aegis Semiconductor Inc   (United States)

Author keywords

Infrared focal plane array; Low cost; MEMS; Optical readout; Tunable thin film filter; Uncooled; Wafer scale packaging

Indexed keywords

INFRARED FOCAL PLANE ARRAY; LOW-COST; OPTICAL READOUT; TUNABLE THIN FILM FILTER; UNCOOLED; WAFER-SCALE PACKAGING;

CAMERAS; CHARGE COUPLED DEVICES; CMOS INTEGRATED CIRCUITS; ELECTRIC RESISTANCE; MICROELECTROMECHANICAL DEVICES; SIGNAL DETECTION; THIN FILMS;

INFRARED IMAGING;

EID: 26444573180     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.603905     Document Type: Conference Paper

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