Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5074, Issue , 2003, Pages 446-457

  Leonov, Vladimir N ^a   Creten, Ybe ^a   De Moor, Piet ^a   Du Bois, Bert ^a   Goessens, Claus ^a   Grietens, Bob ^a,b   Merken, Patrick ^a   Perova, Natalia A ^a,b   Ruttens, Gerlinde ^a   Van Hoof, Chris ^a   Verbist, Agnes ^a   Vermeiren, Jan ^a,b  

^a IMEC   (Belgium)

^b XenICs   (Belgium)

Author keywords

Infrared; Linear array; Microbolometer; Poly SiGe; Readout; Small focal plane array; Thermal detector; Thermal imaging; Uncooled

Indexed keywords

CAVITY RESONATORS; INFRARED DETECTORS; INFRARED IMAGING; MICROELECTROMECHANICAL DEVICES; POLYSILICON; READOUT SYSTEMS; SEMICONDUCTING SILICON COMPOUNDS;

MICROBOLOMETERS; SMALL FOCAL PLANE ARRAY; THERMAL DETECTOR; UNCOOLED;

BOLOMETERS;

EID: 10744225492     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.487084     Document Type: Conference Paper

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