Uncooled thermopile infrared detector linear arrays with detectivity greater than 109 cmHz1/2/W

IEEE Transactions on Electron Devices

Volumn 45, Issue 9, 1998, Pages 1896-1902

  Foote, Marc C ^a   Jones, Eric W ^a   Caillat, Thierry ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Arrays; Detectors; Infrared detectors; Microelectromechanical devices; Noise measurement; Thermoelectric materials devices

Indexed keywords

ARRAYS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SIGNAL NOISE MEASUREMENT; SUBSTRATES; THERMOCOUPLES; THERMOELECTRIC EQUIPMENT; THERMOPILES;

JOHNSON NOISE; THERMOELECTRIC MATERIALS;

INFRARED DETECTORS;

EID: 0032166218     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.711353     Document Type: Article

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