Amorphous silicon based uncooled microbolometer IRFPA

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3698, Issue , 1999, Pages 276-283

  Vedel, Corinne ^a   Martin, Jean Luc ^a   Ouvrier Buffet, Jean Louis ^a   Tissot, Jean Luc ^a   Vilain, Michel ^a   Yon, Jean Jacques ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; BOLOMETERS; ELECTROOPTICAL EFFECTS; SCANNING; THERMAL INSULATION;

AMORPHOUS SILICON UNCOOLED MICROBOLOMETERS; INFRARED FOCAL PLANE ARRAYS (IRFPA);

INFRARED DETECTORS;

EID: 0032664791     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.354529     Document Type: Conference Paper

References (3)