Infrared focal plane array incorporating silicon IC process compatible bolometer

IEEE Transactions on Electron Devices

Volumn 43, Issue 11, 1996, Pages 1844-1850

  Tanaka, Akio ^a   Matsumoto, Shouhei ^a   Tsukamoto, Nanao ^a   Itoh, Shigeyuki ^a   Chiba, Kazuhiro ^a   Endoh, Tsutomu ^a   Nakazato, Akihiro ^a   Okuyama, Kuniyuki ^a   Kumazawa, Yuichi ^a   Hijikawa, Minoru ^a   Gotoh, Hideki ^a   Tanaka, Takanori ^a   Teranishi, Nobukazu ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; CMOS INTEGRATED CIRCUITS; COST EFFECTIVENESS; ELECTRIC CURRENTS; IMAGE SENSORS; INTEGRATED CIRCUIT MANUFACTURE; SIGNAL TO NOISE RATIO; SILICON ON INSULATOR TECHNOLOGY; THIN FILMS; TITANIUM;

BIAS CURRENTS; INFRARED FOCAL PLANE ARRAYS;

INFRARED DETECTORS;

EID: 0030289890     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.543017     Document Type: Article

References (10)

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